Comparisons of one‐ and two‐dimensional three‐moment fluid models for rf glow discharges

1993 ◽  
Vol 74 (2) ◽  
pp. 839-847 ◽  
Author(s):  
Fongray Frank Young ◽  
Chwan‐Hwa ‘‘John’’ Wu
Keyword(s):  
Fluid Models ◽  
Two Dimensional ◽  
Glow Discharges

Two-Dimensional Nonequilibrium Plasma Modeling Based on the Particle-Boltzmann Hybrid Model for RF Glow Discharges

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4789-4793
Author(s):  
Koji Satake ◽  
Toshiaki Monaka ◽  
Osamu Ukai ◽  
Yoshiaki Takeuchi ◽  
Masayoshi Murata
Keyword(s):  
Hybrid Model ◽  
Nonequilibrium Plasma ◽  
Two Dimensional ◽  
Plasma Modeling ◽  
Glow Discharges

Two-dimensional simulations of rf glow discharges inN2andSF6

1990 ◽  
Vol 41 (10) ◽  
pp. 5626-5644 ◽  
Author(s):  
J. H. Tsai ◽  
C. Wu
Keyword(s):  
Two Dimensional ◽  
Glow Discharges

Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model

1994 ◽  
Vol 64 (14) ◽  
pp. 1780-1782 ◽  
Author(s):  
P. M. Meijer ◽  
J. D. P. Passchier ◽  
W. J. Goedheer ◽  
J. Bezemer ◽  
W. G. J. H. M. van Sark
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

Two-dimensional, hybrid model of low-pressure glow discharges

1994 ◽  
Vol 49 (6) ◽  
pp. 5607-5622 ◽  
Author(s):  
A. Fiala ◽  
L. C. Pitchford ◽  
J. P. Boeuf
Keyword(s):  
Hybrid Model ◽  
Low Pressure ◽  
Two Dimensional ◽  
Glow Discharges

Two-dimensional nonequilibrium fluid models for streamers

1993 ◽  
Vol 21 (6) ◽  
pp. 684-695 ◽  
Author(s):  
Jing-Ming Guo ◽  
Chwan-Hwa John Wu
Keyword(s):  
Fluid Models ◽  
Two Dimensional
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