Real‐time spectroellipsometry investigation of the interaction of silane with a Pd thin film: Formation of palladium silicides
2016 ◽
Vol 8
(4)
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pp. 2600-2606
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2003 ◽
Vol 169-170
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pp. 613-615
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2018 ◽
Vol 122
(31)
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pp. 6438-6444
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