Effect of wave-mode conversion device on production of large-area rectangular overdense surface-wave plasmas at the gas pressure about 100 Pa
2000 ◽
Vol 141
(1)
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pp. 12-24
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2006 ◽
Vol 15
(4-8)
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pp. 913-916
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2008 ◽
Vol 128
(6)
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pp. 865-871
2013 ◽
Vol 22
(2)
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pp. 025002
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2021 ◽
Vol 150
(4)
◽
pp. A32-A32
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