Free‐standing silicon microstructures fabricated by laser chemical processing
2007 ◽
Vol 17
(7)
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pp. S164-S167
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1991 ◽
Vol 53
(4)
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pp. 343-345
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2005 ◽
Vol 20
(2)
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pp. 282-287
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2015 ◽
Vol 05
(01)
◽
pp. 28-41
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2000 ◽
Vol 85
(1-3)
◽
pp. 356-360
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2020 ◽
Vol 38
(6)
◽
pp. 062202
1995 ◽
Vol 5
(1)
◽
pp. 1-4
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Keyword(s):
1990 ◽
Vol 8
(6)
◽
pp. 1975
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