Ultrasmooth growth of amorphous silicon films through ion-induced long-range surface correlations

A. Redondo-Cubero; R. Gago; L. Vázquez

doi:10.1063/1.3535612

Ultrasmooth growth of amorphous silicon films through ion-induced long-range surface correlations

Applied Physics Letters ◽

10.1063/1.3535612 ◽

2011 ◽

Vol 98 (1) ◽

pp. 011904 ◽

Cited By ~ 12

Author(s):

A. Redondo-Cubero ◽

R. Gago ◽

L. Vázquez

Keyword(s):

Amorphous Silicon ◽

Long Range ◽

Silicon Films ◽

Surface Correlations

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The long-range ordering, electron spectrum, and properties of amorphous silicon films – I. The generalized Skettrup model

Physica B Condensed Matter ◽

10.1016/s0921-4526(03)00425-3 ◽

2003 ◽

Vol 337 (1-4) ◽

pp. 333-345 ◽

Cited By ~ 9

Author(s):

V. Ligatchev

Keyword(s):

Amorphous Silicon ◽

Long Range ◽

Electron Spectrum ◽

Silicon Films ◽

Long Range Ordering

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The long-range ordering, electron spectrum, and properties of amorphous silicon films—III: Roles of multi-phonon and diabatic effects at carrier excitations

Physica B Condensed Matter ◽

10.1016/j.physb.2004.01.006 ◽

2004 ◽

Vol 348 (1-4) ◽

pp. 420-435 ◽

Cited By ~ 3

Author(s):

V. Ligatchev

Keyword(s):

Amorphous Silicon ◽

Long Range ◽

Electron Spectrum ◽

Silicon Films ◽

Long Range Ordering

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The long-range ordering, electron spectrum, and properties of amorphous silicon films – II. Defect states and optical parameters

Physica B Condensed Matter ◽

10.1016/s0921-4526(03)00422-8 ◽

2003 ◽

Vol 337 (1-4) ◽

pp. 346-356 ◽

Cited By ~ 5

Author(s):

V. Ligatchev

Keyword(s):

Amorphous Silicon ◽

Long Range ◽

Electron Spectrum ◽

Silicon Films ◽

Optical Parameters ◽

Defect States ◽

Long Range Ordering

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HYDROGEN PROFILING IN GAS PHASE DOPED AND ION IMPLANTED AMORPHOUS SILICON FILMS

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19814170 ◽

1981 ◽

Vol 42 (C4) ◽

pp. C4-779-C4-782 ◽

Cited By ~ 5

Author(s):

F. J. Demond ◽

G. Müller ◽

H. Damjantschitsch ◽

H. Mannsperger ◽

S. Kalbitzer ◽

...

Keyword(s):

Amorphous Silicon ◽

Gas Phase ◽

Silicon Films ◽

Ion Implanted

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Crystallization behavior of electron-beam-evaporated amorphous silicon films on textured glass substrates by flash lamp annealing

Thin Solid Films ◽

10.1016/j.tsf.2021.138681 ◽

2021 ◽

Vol 728 ◽

pp. 138681

Author(s):

Aimi Yago ◽

Keisuke Ohdaira

Keyword(s):

Electron Beam ◽

Amorphous Silicon ◽

Crystallization Behavior ◽

Silicon Films ◽

Flash Lamp ◽

Glass Substrates

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The influence of deposition temperature and annealing temperature on the optoelectronic properties of hydrogenated amorphous silicon films

Journal of Applied Physics ◽

10.1063/1.347444 ◽

1991 ◽

Vol 69 (12) ◽

pp. 8320-8328 ◽

Cited By ~ 22

Author(s):

M. Kunst ◽

H.‐C. Neitzert

Keyword(s):

Amorphous Silicon ◽

Deposition Temperature ◽

Annealing Temperature ◽

Hydrogenated Amorphous Silicon ◽

Optoelectronic Properties ◽

Silicon Films ◽

Hydrogenated Amorphous

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Drive‐level capacitance profiling: Its application to determining gap state densities in hydrogenated amorphous silicon films

Applied Physics Letters ◽

10.1063/1.96129 ◽

1985 ◽

Vol 47 (4) ◽

pp. 412-414 ◽

Cited By ~ 144

Author(s):

C. E. Michelson ◽

A. V. Gelatos ◽

J. D. Cohen

Keyword(s):

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Drive Level ◽

Silicon Films ◽

State Densities ◽

Hydrogenated Amorphous ◽

Gap State

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Internal stresses in amorphous silicon films deposited by cylindrical magnetron sputtering using Ne, Ar, Kr, Xe and Ar + H2

Vacuum ◽

10.1016/0042-207x(82)90064-1 ◽

1982 ◽

Vol 32 (4) ◽

pp. 213

Keyword(s):

Magnetron Sputtering ◽

Amorphous Silicon ◽

Silicon Films ◽

Internal Stresses ◽

Cylindrical Magnetron

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Catalytic doping of phosphorus and boron atoms on hydrogenated amorphous silicon films

Japanese Journal of Applied Physics ◽

10.7567/jjap.55.04es05 ◽

2016 ◽

Vol 55 (4S) ◽

pp. 04ES05 ◽

Cited By ~ 11

Author(s):

Junichi Seto ◽

Keisuke Ohdaira ◽

Hideki Matsumura

Keyword(s):

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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Structural, Optical, and Electrical Properties of Amorphous Silicon Films

Physical Review B ◽

10.1103/physrevb.1.2632 ◽

1970 ◽

Vol 1 (6) ◽

pp. 2632-2641 ◽

Cited By ~ 469

Author(s):

M. H. Brodsky ◽

R. S. Title ◽

K. Weiser ◽

G. D. Pettit

Keyword(s):

Electrical Properties ◽

Amorphous Silicon ◽

Silicon Films ◽

Optical And Electrical Properties

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