Time‐ and space‐resolved radio‐frequency plasma electron energy distributions from a displacement‐current‐based electric probe diagnostic
1999 ◽
Vol 119
(6)
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pp. 866-871
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Keyword(s):
1998 ◽
Vol 16
(4)
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pp. 2162-2172
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2021 ◽
Vol 1923
(1)
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pp. 012020
2013 ◽
Vol 84
(6)
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pp. 063904
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Keyword(s):
2004 ◽
Vol 37
(19)
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pp. R217-R236
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