Time‐resolved optical emission and electron energy distribution function measurements in rf plasmas

K. R. Stalder; C. A. Anderson; A. A. Mullan; W. G. Graham

doi:10.1063/1.351735

Time‐resolved optical emission and electron energy distribution function measurements in rf plasmas

Journal of Applied Physics ◽

10.1063/1.351735 ◽

1992 ◽

Vol 72 (4) ◽

pp. 1290-1296 ◽

Cited By ~ 7

Author(s):

K. R. Stalder ◽

C. A. Anderson ◽

A. A. Mullan ◽

W. G. Graham

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Optical Emission ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Time Resolved ◽

Rf Plasmas

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Form-Free Reconstruction of an Electron Energy Distribution Function from Optical Emission Spectroscopy

10.1063/1.2909110 ◽

2008 ◽

Cited By ~ 1

Author(s):

D. Dodt ◽

A. Dinklage ◽

R. Fischer ◽

K. Bartschat ◽

O. Zatsarinny ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Time-Resolved Electron Energy Distribution Function in Pulsed Surface Wave Plasma Generated by Ring-Slot Antenna

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l1188 ◽

2003 ◽

Vol 42 (Part 2, No. 10A) ◽

pp. L1188-L1190 ◽

Cited By ~ 7

Author(s):

Hiroyuki Murohashi ◽

Tetsu Okamoto ◽

Yukio Okamoto

Keyword(s):

Distribution Function ◽

Surface Wave ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Slot Antenna ◽

Electron Energy Distribution ◽

Time Resolved

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Time-resolved measurements of the electron energy distribution function in a helicon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/10/2/312 ◽

2001 ◽

Vol 10 (2) ◽

pp. 226-235 ◽

Cited By ~ 33

Author(s):

David D Blackwell ◽

Francis F Chen

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Helicon Plasma ◽

Time Resolved ◽

Time Resolved Measurements

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Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas

Materials Science Forum ◽

10.4028/www.scientific.net/msf.140-142.107 ◽

1993 ◽

Vol 140-142 ◽

pp. 107-120

Author(s):

M. Capitelli ◽

G. Capriati ◽

M. Dilonardo ◽

C. Gorse ◽

S. Longo

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Rf Plasmas ◽

Theoretical Characterization

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Temporally and spatially resolved optical emission and electron energy distribution function related to ionization waves

Physics of Fluids B Plasma Physics ◽

10.1063/1.860767 ◽

1993 ◽

Vol 5 (7) ◽

pp. 2331-2333 ◽

Cited By ~ 5

Author(s):

K. Ohe ◽

S. Takeshima ◽

T. Kimura

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Optical Emission ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Spatially Resolved ◽

Ionization Waves

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Time-Resolved Electron Energy Distribution Function in Time-Varying Weakly Ionized Plasmas

Japanese Journal of Applied Physics ◽

10.1143/jjap.28.1997 ◽

1989 ◽

Vol 28 (Part 1, No. 10) ◽

pp. 1997-2003 ◽

Cited By ~ 7

Author(s):

Kazuyuki Ohe ◽

Takashi Kimura

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Time Varying ◽

Electron Energy Distribution ◽

Time Resolved ◽

Ionized Plasmas ◽

Weakly Ionized

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Time resolved determination of the electron energy distribution function in a DC pulsed plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/5/3/024 ◽

1996 ◽

Vol 5 (3) ◽

pp. 553-559 ◽

Cited By ~ 5

Author(s):

Robert Hugon ◽

Gérard Henrion ◽

Michel Fabry

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Pulsed Plasma ◽

Electron Energy Distribution ◽

Time Resolved

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Time-Resolved Electron Energy Distribution Function Measurements in a Low-Frequency r.f. Glow Discharge

EPL (Europhysics Letters) ◽

10.1209/0295-5075/8/2/006 ◽

1989 ◽

Vol 8 (2) ◽

pp. 141-145 ◽

Cited By ~ 21

Author(s):

M. B Hopkins ◽

C. A Anderson ◽

W. G Graham

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Time Resolved

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Time‐resolved electron energy distribution function measurements in a pulsed magnetic multipole hydrogen discharge

Journal of Applied Physics ◽

10.1063/1.348531 ◽

1991 ◽

Vol 69 (6) ◽

pp. 3461-3466 ◽

Cited By ~ 31

Author(s):

M. B. Hopkins ◽

W. G. Graham

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Time Resolved ◽

Hydrogen Discharge

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Apparatus for the electron energy distribution function measurement in the afterglow discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01589560 ◽

1977 ◽

Vol 27 (9) ◽

pp. 1027-1033 ◽

Cited By ~ 1

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Function Measurement

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