Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model
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1998 ◽
Vol 37
(Part 1, No. 1)
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pp. 308-312
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2008 ◽
Vol 128
(4)
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pp. 656-664
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2013 ◽
Vol 30
(8)
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pp. 085201
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1980 ◽
Vol 13
(6)
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pp. L101-L105
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