Boron ion implantation through Mo and Mo silicide layers for shallow junction formation

1991 ◽  
Vol 69 (7) ◽  
pp. 3962-3967 ◽  
Author(s):  
R. Angelucci ◽  
S. Solmi ◽  
A. Armigliato ◽  
S. Guerri ◽  
M. Merli ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Shallow Junction ◽  
Junction Formation

Silicided shallow junction formation by ion implantation of impurity ions into silicide layers and subsequent drive‐in

1987 ◽  
Vol 61 (11) ◽  
pp. 5084-5088 ◽  
Author(s):  
D. L. Kwong ◽  
Y. H. Ku ◽  
S. K. Lee ◽  
E. Louis ◽  
N. S. Alvi ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Shallow Junction ◽  
Junction Formation ◽  
Impurity Ions

Shallow junction formation by decaborane molecular ion implantation

2000 ◽  
Vol 18 (1) ◽  
pp. 445 ◽  
Author(s):  
Majeed A. Foad ◽  
Roger Webb ◽  
Roger Smith ◽  
Jiro Matsuo ◽  
Amir Al-Bayati ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Molecular Ion ◽  
Shallow Junction ◽  
Junction Formation
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