scholarly journals Thickness measurement of thin films by x‐ray absorption

1991 ◽  
Vol 69 (1) ◽  
pp. 499-501 ◽  
Author(s):  
J. Chaudhuri ◽  
S. Shah
2005 ◽  
Vol 495-497 ◽  
pp. 99-104
Author(s):  
I. Tomov

Allowing for secondary extinction (SE), a method is described for thickness measurement of thin films by x-ray absorption. The method is tested by employing Al foils and electrodeposited Cu films detached by the substrate. The thicknesses determined by the method were in fair agreement with that ones measured by the ordinary absorption method based on using incident beam intensities. Moreover, a dependence of the SE coefficient on the transmission factor of the films was experimentally shown, and thus additional light was thrown on the nature of SE.


1989 ◽  
Vol 161 ◽  
Author(s):  
J. Chaudhuri ◽  
S. Shah

ABSTRACTAn x-ray diffraction method is described for determining thicknesses of thin films grown on single crystal substrates. The equations, based on the kinematical theory of x-ray diffraction and the mosaic crystal model, were developed. The thickness of the thin film was computed from the absorption of the integrated diffracted x-ray intensity from the single crystal substrate by the film. Since the diffracted intensity from the film is not required, the film does not have to be single crystal in nature. Thus, thicknesses of less ordered, polycrystalline or even amorphous films can be measured with high precision by this technique.


2000 ◽  
Vol 454-456 ◽  
pp. 723-728 ◽  
Author(s):  
H. Magnan ◽  
P. Le Fèvre ◽  
A. Midoir ◽  
D. Chandesris ◽  
H. Jaffrès ◽  
...  

2011 ◽  
Author(s):  
Yogesh Kumar ◽  
Abhinav Pratap Singh ◽  
P. Thakur ◽  
Ravi Kumar ◽  
Alka B. Garg ◽  
...  

2014 ◽  
Vol 104 (24) ◽  
pp. 242113 ◽  
Author(s):  
Sin Cheng Siah ◽  
Sang Woon Lee ◽  
Yun Seog Lee ◽  
Jaeyeong Heo ◽  
Tomohiro Shibata ◽  
...  

1996 ◽  
Vol 281-282 ◽  
pp. 314-317 ◽  
Author(s):  
F. Esaka ◽  
H. Shimada ◽  
M. Imamura ◽  
N. Matsubayashi ◽  
T. Sato ◽  
...  

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