Active low temperature oxidation as a route to minimize electrode–oxide interface reactions in nanoscale capacitors
Keyword(s):
2009 ◽
Keyword(s):
2007 ◽
Vol 42
(12)
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pp. 4684-4691
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2017 ◽
Vol 36
(1)
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pp. 365-372
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Keyword(s):
2015 ◽
Vol 56
(3)
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pp. 379-385
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