Time resolved x‐ray diffraction study of laser annealing in silicon at grazing incidence

J. R. Buschert; J. Z. Tischler; D. M. Mills; Q. Zhao; R. Colella

doi:10.1063/1.344109

Time resolved x‐ray diffraction study of laser annealing in silicon at grazing incidence

Journal of Applied Physics ◽

10.1063/1.344109 ◽

1989 ◽

Vol 66 (8) ◽

pp. 3523-3525 ◽

Cited By ~ 14

Author(s):

J. R. Buschert ◽

J. Z. Tischler ◽

D. M. Mills ◽

Q. Zhao ◽

R. Colella

Keyword(s):

Diffraction Study ◽

Laser Annealing ◽

Grazing Incidence ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray

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In situ time resolved wide angle X-ray diffraction study of nanotube carpet growth: Nature of catalyst particles and progressive nanotube alignment

Carbon ◽

10.1016/j.carbon.2015.01.046 ◽

2015 ◽

Vol 87 ◽

pp. 246-256 ◽

Cited By ~ 10

Author(s):

Périne Landois ◽

Mathieu Pinault ◽

Stéphan Rouzière ◽

Dominique Porterat ◽

Cristian Mocuta ◽

...

Keyword(s):

Diffraction Study ◽

Wide Angle ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray

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Grazing-incidence x-ray diffraction study of pentacene thin films with the bulk phase structure

Applied Physics Letters ◽

10.1063/1.2349307 ◽

2006 ◽

Vol 89 (10) ◽

pp. 101919 ◽

Cited By ~ 46

Author(s):

Hiroyuki Yoshida ◽

Naoki Sato

Keyword(s):

Thin Films ◽

Diffraction Study ◽

Phase Structure ◽

Grazing Incidence ◽

Bulk Phase ◽

X Ray Diffraction ◽

X Ray

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Grazing incidence synchrotron X-ray diffraction study of crystal orientation in microporous films

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(02)01713-5 ◽

2003 ◽

Vol 200 ◽

pp. 160-164 ◽

Cited By ~ 1

Author(s):

S. Mintova ◽

T.H. Metzger ◽

T. Bein

Keyword(s):

Diffraction Study ◽

Crystal Orientation ◽

Grazing Incidence ◽

X Ray Diffraction ◽

X Ray ◽

Microporous Films

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Time-resolved x-ray diffraction study of photostimulated purple membrane

Biophysical Journal ◽

10.1016/s0006-3495(85)83930-8 ◽

1985 ◽

Vol 47 (3) ◽

pp. 387-393 ◽

Cited By ~ 12

Author(s):

R.D. Frankel ◽

J.M. Forsyth

Keyword(s):

Diffraction Study ◽

Purple Membrane ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray

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Freezing and thawing of montmorillonite — A time-resolved synchrotron X-ray diffraction study

Applied Clay Science ◽

10.1016/j.clay.2010.04.015 ◽

2010 ◽

Vol 49 (3) ◽

pp. 127-134 ◽

Cited By ~ 14

Author(s):

Per Daniel Svensson ◽

Staffan Hansen

Keyword(s):

Diffraction Study ◽

X Ray Diffraction ◽

Freezing And Thawing ◽

Time Resolved ◽

X Ray

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Time-resolved X-ray diffraction study of the piezoelectric response of single crystals

Acta Crystallographica Section A Foundations of Crystallography ◽

10.1107/s0108767310098788 ◽

2010 ◽

Vol 66 (a1) ◽

pp. s55-s56

Author(s):

Raphael Grifone ◽

Oleg Schmidt ◽

Semen Gorfman ◽

Ullrich Pietsch

Keyword(s):

Diffraction Study ◽

Single Crystals ◽

Piezoelectric Response ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray

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Cation Movements during Dehydration and NO2 Desorption in a Ba–Y,FAU Zeolite: An in Situ Time-Resolved X-ray Diffraction Study

The Journal of Physical Chemistry C ◽

10.1021/jp308307m ◽

2013 ◽

Vol 117 (8) ◽

pp. 3915-3922 ◽

Cited By ~ 32

Author(s):

Xianqin Wang ◽

Jonathan C. Hanson ◽

Ja Hun Kwak ◽

Janos Szanyi ◽

Charles H. F. Peden

Keyword(s):

Diffraction Study ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray ◽

Fau Zeolite

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In situx-ray reflectivity and grazing incidence x-ray diffraction study ofL10ordering in57Fe/Pt multilayers

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/21/18/186002 ◽

2009 ◽

Vol 21 (18) ◽

pp. 186002 ◽

Cited By ~ 8

Author(s):

V Raghavendra Reddy ◽

Ajay Gupta ◽

Anil Gome ◽

Wolfram Leitenberger ◽

U Pietsch

Keyword(s):

Diffraction Study ◽

Grazing Incidence ◽

X Ray Diffraction ◽

X Ray

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Time-Resolved X-ray Diffraction Study of Solid Combustion Reactions

Science ◽

10.1126/science.249.4975.1406 ◽

1990 ◽

Vol 249 (4975) ◽

pp. 1406-1409 ◽

Cited By ~ 95

Author(s):

J. Wong ◽

E. M. Larson ◽

J. B. Holt ◽

P. A. Waide ◽

B. Rupp ◽

...

Keyword(s):

Diffraction Study ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray

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Synchrotron X-Ray Study of the Structure of Silicon During Pulsed Laser Processing

MRS Proceedings ◽

10.1557/proc-4-13 ◽

1981 ◽

Vol 4 ◽

Cited By ~ 1

Author(s):

B. C. Larson ◽

C. W. White ◽

T. S. Noggle ◽

J. F. Barhorst ◽

D. Mills

Keyword(s):

Laser Annealing ◽

Pulsed Laser ◽

Temperature Profiles ◽

X Ray Diffraction ◽

Time Resolved ◽

Near Surface ◽

X Ray ◽

Pulsed Laser Annealing ◽

Pulsed Laser Processing ◽

Thermal Melting

ABSTRACTSynchrotron x-ray pulses have been used to make nanosecond resolution time-resolved x-ray diffraction measurements on silicon during pulsed laser annealing. Thermal expansion analysis of near-surface strains during annealing has provided depth dependent temperature profiles indicating >1100°C temperatures and diffraction from boron implanted silicon has shown evidence for near-surface melting. These results are in qualitative agreement with the thermal melting model of laser annealing.

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