Spectroscopic ellipsometry and transmission electron microscopy study of annealed high‐dose oxygen implanted silicon

J. Vanhellemont; H. E. Maes; A. De Veirman

doi:10.1063/1.343295

Spectroscopic ellipsometry and transmission electron microscopy study of annealed high‐dose oxygen implanted silicon

Journal of Applied Physics ◽

10.1063/1.343295 ◽

1989 ◽

Vol 65 (11) ◽

pp. 4454-4456 ◽

Cited By ~ 30

Author(s):

J. Vanhellemont ◽

H. E. Maes ◽

A. De Veirman

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Spectroscopic Ellipsometry ◽

Microscopy Study ◽

Electron Microscopy Study ◽

High Dose ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Transmission electron microscopy study of high-dose iron-implanted sapphire

Materials Characterization ◽

10.1016/j.matchar.2015.02.011 ◽

2015 ◽

Vol 102 ◽

pp. 19-23 ◽

Cited By ~ 2

Author(s):

Y. Wang ◽

X.P. Liu ◽

G.W. Qin

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

High Dose ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Transmission electron microscopy study of extended defects in high dose He-implanted GaN after annealing at 450 °C

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2019.06.009 ◽

2019 ◽

Vol 454 ◽

pp. 45-49 ◽

Cited By ~ 2

Author(s):

Bingsheng Li ◽

Yuzhu Liu ◽

Huiping Liu ◽

Long Kang ◽

Anli Xiong

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

High Dose ◽

Extended Defects ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Transmission electron microscopy study of simultaneous high-dose C++N+ co-implantation into (111)Si

Thin Solid Films ◽

10.1016/s0040-6090(02)01284-1 ◽

2003 ◽

Vol 426 (1-2) ◽

pp. 16-30 ◽

Cited By ~ 2

Author(s):

F Morales

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

High Dose ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Effects of high dose Pb/sup +/ implantation on Si: atomic force and transmission electron microscopy study

IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) ◽

10.1109/ivmc.2001.939739 ◽

2002 ◽

Author(s):

C. Angelov ◽

P. Groudev

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

High Dose ◽

Transmission Electron Microscopy Study ◽

Atomic Force ◽

Transmission Electron

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Effects of high dose Bi+ implantation on Si : An atomic force and transmission electron microscopy study

Vacuum ◽

10.1016/s0042-207x(98)00176-6 ◽

1998 ◽

Vol 51 (2) ◽

pp. 285-288 ◽

Cited By ~ 2

Author(s):

Ch Angelov ◽

J Faure ◽

M Kalitzova ◽

S Simov ◽

T Tzvetkova ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

High Dose ◽

Transmission Electron Microscopy Study ◽

Atomic Force ◽

Transmission Electron

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High-resolution transmission electron microscopy study of defects and interfaces in epitaxial TiO 2 films on sapphire and LaAlO 3

Philosophical Magazine A ◽

10.1080/01418610110087291 ◽

2002 ◽

Vol 82 (4) ◽

pp. 735-749 ◽

Cited By ~ 3

Author(s):

J. Y.Huang ◽

B. H. Park ◽

David Jan ◽

X. Q. Pan ◽

Yuntian T. Zhu ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

High Resolution ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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A SCANNING AND TRANSMISSION ELECTRON MICROSCOPY STUDY OF POOL BOILING SURFACES

10.1615/ihtc4.140 ◽

1970 ◽

Cited By ~ 2

Author(s):

G. H. Nix ◽

R.I. Vachon ◽

D. M. Hall

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Pool Boiling ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Transmission electron microscopy study of a precipitate which forms in the Al-Mg-Si system

Philosophical Magazine Letters ◽

10.1080/095008396180407 ◽

1996 ◽

Vol 74 (2) ◽

pp. 57-66 ◽

Cited By ~ 34

Author(s):

L. Sagalowicz ◽

G. Lapasset ◽

G. Hug

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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In Situ Scanning Transmission Electron Microscopy Study of MoS2 Formation on Graphene with a Deep-Learning Framework

ACS Omega ◽

10.1021/acsomega.1c03002 ◽

2021 ◽

Author(s):

Yeongdong Lee ◽

Jongyeong Lee ◽

Handolsam Chung ◽

Jaemin Kim ◽

Zonghoon Lee

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Learning Framework ◽

Transmission Electron ◽

Scanning Transmission

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In Situ Transmission Electron Microscopy Study on the Deformation Responses of Additively Manufactured Multiphase Ni-based Superalloy

Microscopy and Microanalysis ◽

10.1017/s1431927620019571 ◽

2020 ◽

Vol 26 (S2) ◽

pp. 1844-1846

Author(s):

Qianying Guo ◽

Michael M. Kirka ◽

Kinga A. Unocic

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

Download Full-text

Spectroscopic ellipsometry and transmission electron microscopy study of annealed high‐dose oxygen implanted silicon

Transmission electron microscopy study of high-dose iron-implanted sapphire

Transmission electron microscopy study of extended defects in high dose He-implanted GaN after annealing at 450 °C

Transmission electron microscopy study of simultaneous high-dose C++N+ co-implantation into (111)Si

Effects of high dose Pb/sup +/ implantation on Si: atomic force and transmission electron microscopy study

Effects of high dose Bi+ implantation on Si : An atomic force and transmission electron microscopy study

High-resolution transmission electron microscopy study of defects and interfaces in epitaxial TiO 2 films on sapphire and LaAlO 3

A SCANNING AND TRANSMISSION ELECTRON MICROSCOPY STUDY OF POOL BOILING SURFACES

Transmission electron microscopy study of a precipitate which forms in the Al-Mg-Si system

In Situ Scanning Transmission Electron Microscopy Study of MoS2 Formation on Graphene with a Deep-Learning Framework

In Situ Transmission Electron Microscopy Study on the Deformation Responses of Additively Manufactured Multiphase Ni-based Superalloy

Transmission electron microscopy study of extended defects in high dose He-implanted GaN after annealing at 450 °C