A two‐dimensional computer simulation for dry etching using Monte Carlo techniques
Keyword(s):
2010 ◽
Vol 150-151
◽
pp. 1358-1363
Keyword(s):
2011 ◽
Vol 15
(9)
◽
pp. 4746-4755
◽
Keyword(s):
1980 ◽
Vol 72
(2)
◽
pp. 1412-1413
◽
Keyword(s):
1990 ◽
Vol 48
(4)
◽
pp. 140-141