Structural origin of surface morphological modifications developed on poly(ethylene terephthalate) by excimer laser photoablation

1988 ◽  
Vol 64 (1) ◽  
pp. 365-370 ◽  
Author(s):  
Y. Novis ◽  
J. J. Pireaux ◽  
A. Brezini ◽  
E. Petit ◽  
R. Caudano ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Ethylene Terephthalate ◽  
Poly Ethylene Terephthalate ◽  
Poly Ethylene

Large Area Photochemical Dry Etching of Polymers with Incoherent Excimer UV Radiation

1991 ◽  
Vol 236 ◽  
Author(s):  
Hilmar Esrom ◽  
Jun-Ying Zhang ◽  
Ulrich Kogelschatz
Keyword(s):  
Surface Modification ◽  
Excimer Laser ◽  
Ethylene Terephthalate ◽  
Dry Etching ◽  
Mercury Lamp ◽  
Large Area ◽  
Exposed Area ◽  
Poly Ethylene Terephthalate ◽  
Laser Experiments ◽  
Poly Ethylene

AbstractPhotochemical dry etching and surface modification of different polymers, e.g., poly-methylmethacrylate (PMMA), polyimid (PI) and poly-ethylene terephthalate (PET) was achieved with an incoherent excimer UV source. Decomposition and etch rates of PMMA were determined as a function of UV intensity and exposure time at different wavelengths λ = 172 nm (Xe2*), λ = 222 nm (KrCI*) and λ = 308 nm (XeCI*). The morphology of the exposed area of PMMA was investigated with SEM. The etching of the polymers can be explained as a result of extensive photooxidation. The results are compared with data obtained from mercury lamp and excimer laser experiments.

Surface structuring of poly(ethylene terephthalate) by UV excimer laser

2003 ◽  
Vol 132 (1-3) ◽  
pp. 114-118 ◽  
Author(s):  
Wilson Wong ◽  
Kwong Chan ◽  
Kwok Wing Yeung ◽  
Kai Shui Lau
Keyword(s):  
Excimer Laser ◽  
Ethylene Terephthalate ◽  
Surface Structuring ◽  
Poly Ethylene Terephthalate ◽  
Poly Ethylene
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