Growth kinetics and step density in reflection high‐energy electron diffraction during molecular‐beam epitaxy

1988 ◽  
Vol 63 (7) ◽  
pp. 2272-2283 ◽  
Author(s):  
Shaun Clarke ◽  
Dimitri D. Vvedensky
Keyword(s):  
Molecular Beam Epitaxy ◽  
Electron Diffraction ◽  
Growth Kinetics ◽  
Molecular Beam ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Step Density

Surface Of Li-Doped ZnSe Grown On Misoriented GaAs(001) Substrates

1996 ◽  
Vol 442 ◽  
Author(s):  
Minoru Yoneta ◽  
Masakazu Ohishi ◽  
Hiroshi Saito ◽  
Mitsuhiro Ohura ◽  
Katsumoto Fujii ◽  
...  
Keyword(s):  
Growth Rate ◽  
Molecular Beam Epitaxy ◽  
Electron Diffraction ◽  
Molecular Beam ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Photoluminescence Spectra ◽  
Step Density

AbstractThe surface of Li-doped ZnSe grown on misoriented GaAs(001) substrates by molecular beam epitaxy is studied by means of reflection high energy electron diffraction. Sharp and curved streaky RHEED patterns are observed for all the layers grown on the misoriented substrate towards [110], irrespective of off-angles. No curved pattern, however, is observed on ZnSe layers grown on misoriented GaAs(001) towards [110] with off-angle larger than 5°. We confirmed that the Li-array is surely formed along [110], and that the length of the Li-array is longer than 32Å to be observable as curved streaks. It is also confirmed that the growth rate of Li-doped ZnSe is proportional to the step density, and that the growth rate on the misoriented substrate towards [110] is higher than that on the misoriented substrate towards [110]. The photoluminescence spectra of Li-doped ZnSe layers grown on misoriented GaAs are reported.

Reflection High Energy Electron Diffraction Intensity Oscillations during the Growth of ZnSe on Cleaved GaAs(110) Surface by Molecular Beam Epitaxy

1996 ◽  
Vol 35 (Part 2, No. 3B) ◽  
pp. L366-L369 ◽  
Author(s):  
Hyun-Chul Ko ◽  
Shigeo Yamaguchi ◽  
Hitoshi Kurusu ◽  
Yoichi Kawakami ◽  
Shizuo Fujita ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Electron Diffraction ◽  
Molecular Beam ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Diffraction Intensity

Reflection High-Energy-Electron Diffraction Study of Inp and InAs (100) In Gas-Source Molecular Beam Epitaxy

1990 ◽  
Vol 216 ◽  
Author(s):  
T. P. Chin ◽  
B. W. Liang ◽  
H. Q. Hou ◽  
C. W. Tu
Keyword(s):  
Molecular Beam Epitaxy ◽  
Electron Diffraction ◽  
Molecular Beam ◽  
Electron Diffraction Study ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Group V ◽  
Precise Control ◽  
Gas Source

ABSTRACTInP and InAs (100) were grown by gas-source molecular-beam epitaxy (GSMBE) with arsine, phosphine, and elemental indium. Reflection high-energy-electron diffraction (RHEED) was used to monitor surface reconstructions and growth rates. (2×4) to (2×1) transition was observed on InP (100) as phosphine flow rate increased. (4×2) and (2×4) patterns were observed for In-stabilized and As-stabilized InAs surfaces, respectively. Both group-V and group-rn-induced RHEED oscillations were observed. The group-V surface desorption activation energy were measured to be 0.61 eV for InP and 0.19 eV for InAs. By this growth rate study, we are able to establish a precise control of V/HII atomic ratios in GSMBE of InP and InAs.

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