Microstructure of sputtered garnet films for magneto‐optical recording media

1988 ◽  
Vol 63 (8) ◽  
pp. 3639-3641 ◽  
Author(s):  
K. Shono ◽  
H. Kano ◽  
N. Koshino ◽  
S. Ogawa
Author(s):  
Takao Suzuki ◽  
Hossein Nuri

For future high density magneto-optical recording materials, a Bi-substituted garnet film ((BiDy)3(FeGa)5O12) is an attractive candidate since it has strong magneto-optic effect at short wavelengths less than 600 nm. The signal in read back performance at 500 nm using a garnet film can be an order of magnitude higher than a current rare earth-transition metal amorphous film. However, the granularity and surface roughness of such crystalline garnet films are the key to control for minimizing media noise.We have demonstrated a new technique to fabricate a garnet film which has much smaller grain size and smoother surfaces than those annealed in a conventional oven. This method employs a high ramp-up rate annealing (Γ = 50 ~ 100 C/s) in nitrogen atmosphere. Fig.1 shows a typical microstruture of a Bi-susbtituted garnet film deposited by r.f. sputtering and then subsequently crystallized by a rapid thermal annealing technique at Γ = 50 C/s at 650 °C for 2 min. The structure is a single phase of garnet, and a grain size is about 300A.


1989 ◽  
Vol 25 (5) ◽  
pp. 3545-3549 ◽  
Author(s):  
M.H. Kryder ◽  
H.-P.D. Shieh ◽  
W.H. Meiklejohn ◽  
R.E. Skoda

1996 ◽  
Vol 154 (2) ◽  
pp. 271-278 ◽  
Author(s):  
K. Shimokawa ◽  
H. Dohnomae ◽  
T. Mukai ◽  
H. Yamada ◽  
H. Matsuda ◽  
...  

2001 ◽  
Vol 79 (10) ◽  
pp. 1528-1530 ◽  
Author(s):  
M. Sugiyama ◽  
S. Inasawa ◽  
S. Koda ◽  
T. Hirose ◽  
T. Yonekawa ◽  
...  

2007 ◽  
Vol 15 (14) ◽  
pp. 8543 ◽  
Author(s):  
L. P. Krul ◽  
V. Matusevich ◽  
D. Hoff ◽  
R. Kowarschik ◽  
Yu. I. Matusevich ◽  
...  

2010 ◽  
Vol 86 (2) ◽  
pp. 182-189 ◽  
Author(s):  
Xiaoyi Li ◽  
Yiqun Wu ◽  
Donghong Gu ◽  
Fuxi Gan

1988 ◽  
Vol 63 (8) ◽  
pp. 3844-3846 ◽  
Author(s):  
M. D. Schultz ◽  
H‐P. D. Shieh ◽  
M. H. Kryder

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