Theoretical evaluation of the buffer gas effects for a self‐sustained discharge ArF laser
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1996 ◽
Vol 29
(1)
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pp. 43-49
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1997 ◽
Vol 27
(8)
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pp. 665-669
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2020 ◽
Vol 64
(1-4)
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pp. 201-210
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1999 ◽
Vol 5
(1)
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pp. 90-96
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2019 ◽
Vol 7
(3)
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pp. 361-371
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