X‐ray diffraction analysis of buffer layer effects on lattice distortions of strained layer superlattices

1987 ◽  
Vol 62 (3) ◽  
pp. 1124-1127 ◽  
Author(s):  
K. Kamigaki ◽  
H. Sakashita ◽  
H. Kato ◽  
M. Nakayama ◽  
N. Sano ◽  
...  
Keyword(s):  
Diffraction Analysis ◽  
Buffer Layer ◽  
X Ray Diffraction ◽  
X Ray ◽  
Strained Layer ◽  
Lattice Distortions ◽  
Strained Layer Superlattices

Structure of Highly Perfect Semiconductor Strained-Layer Superlattices: High-Resolution X-Ray Diffraction and Computer Simulation Studies

1989 ◽  
Vol 145 ◽  
Author(s):  
J. M. Vandenberg
Keyword(s):  
High Resolution ◽  
Periodic Structures ◽  
X Ray Diffraction ◽  
Ray Method ◽  
X Ray ◽  
Strained Layer ◽  
Step Model ◽  
Computer Simulation Studies ◽  
Strained Layer Superlattices

AbstractHigh-resolution x-ray diffraction (HRXRD) measurements of strained-layer superlattices (SLS's) have been carried out using a four-crystal monochromator. A wide asymmetric range of sharp higher-order x-ray satellite peaks is observed indicating well-defined periodic structures. Using a kinematical diffraction step model very good agreement between measured and simulated x-ray satellite patterns could be achieved. These results show that this x-ray method is a powerful tool to evaluate the crystal quality of SLS's.

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