Characterization of hydrogenated amorphous silicon by capacitance‐voltage and surface photovoltage measurements using liquid Schottky barriers

1987 ◽  
Vol 61 (5) ◽  
pp. 1916-1927 ◽  
Author(s):  
I. Sakata ◽  
T. Ishida ◽  
S. Okazaki ◽  
T. Saitoh ◽  
M. Yamanaka ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Schottky Barriers ◽  
Surface Photovoltage ◽  
Capacitance Voltage ◽  
Hydrogenated Amorphous

Characterization of hydrogenated amorphous silicon-carbon films deposited by hybrid-plasma CVD

1994 ◽  
Vol 34 (1-4) ◽  
pp. 409-414 ◽  
Author(s):  
Tadashi Fujii ◽  
Kenji Sameshima ◽  
Hiroshi Okada ◽  
Kenji Yoshida ◽  
Tadao Hashimoto ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Silicon Carbon ◽  
Hybrid Plasma ◽  
Hydrogenated Amorphous

Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films

1999 ◽  
Vol 85 (11) ◽  
pp. 7914-7918 ◽  
Author(s):  
D. Toet ◽  
P. M. Smith ◽  
T. W. Sigmon ◽  
T. Takehara ◽  
C. C. Tsai ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Structural Characterization ◽  
Hydrogenated Amorphous Silicon ◽  
Laser Crystallization ◽  
Silicon Thin Films ◽  
Hydrogenated Amorphous
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