Profiling of inhomogeneous carrier transport properties with the influence of temperature in silicon‐on‐insulator films formed by oxygen implantation

1986 ◽  
Vol 60 (9) ◽  
pp. 3199-3203 ◽  
Author(s):  
S. Cristoloveanu ◽  
J. H. Lee ◽  
J. Pumfrey ◽  
J. R. Davis ◽  
R. P. Arrowsmith ◽  
...  
2017 ◽  
Vol 10 (2) ◽  
pp. 024103 ◽  
Author(s):  
Toshinori Matsushima ◽  
Sunbin Hwang ◽  
Shinobu Terakawa ◽  
Takashi Fujihara ◽  
Atula S. D. Sandanayaka ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document