Cross‐sectional transmission electron microscopy investigation of Ti/Si reaction on phosphorus‐doped polycrystalline silicon gate

C. Y. Wong; F. S. Lai; P. A. McFarland; F. M. d’Heurle; C. Y. Ting

doi:10.1063/1.336986

Cross‐sectional transmission electron microscopy investigation of Ti/Si reaction on phosphorus‐doped polycrystalline silicon gate

Journal of Applied Physics ◽

10.1063/1.336986 ◽

1986 ◽

Vol 59 (8) ◽

pp. 2773-2776 ◽

Cited By ~ 16

Author(s):

C. Y. Wong ◽

F. S. Lai ◽

P. A. McFarland ◽

F. M. d’Heurle ◽

C. Y. Ting

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Polycrystalline Silicon ◽

Transmission Electron Microscopy Investigation ◽

Cross Sectional ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation ◽

Phosphorus Doped

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Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devices

The 1998 international conference on characterization and metrology for ULSI technology ◽

10.1063/1.56880 ◽

1998 ◽

Cited By ~ 2

Author(s):

H. Bender ◽

P. Van Marcke ◽

C. Drijbooms ◽

P. Roussel

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Focused Ion Beam ◽

Ion Beam ◽

Transmission Electron Microscopy Investigation ◽

Cross Sectional ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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Cross-sectional transmission electron microscopy investigation of xenon irradiated glassy carbon

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(93)90825-q ◽

1993 ◽

Vol 80-81 ◽

pp. 1480-1484 ◽

Cited By ~ 2

Author(s):

D. McCulloch ◽

S. Prawer ◽

A. Hoffman ◽

D.K. Sood

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Glassy Carbon ◽

Transmission Electron Microscopy Investigation ◽

Cross Sectional ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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Cross-sectional transmission electron microscopy investigation of the dead layer of ZnS:Ag,Al phosphors in field emission displays

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1381405 ◽

2001 ◽

Vol 19 (4) ◽

pp. 1083-1089 ◽

Cited By ~ 12

Author(s):

K. Kajiwara

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Field Emission ◽

Dead Layer ◽

Transmission Electron Microscopy Investigation ◽

Cross Sectional ◽

Field Emission Displays ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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Transmission electron microscopy investigation of borondoped polycrystalline chemically vapour-deposited diamond

Philosophical Magazine A ◽

10.1080/01418610210131029 ◽

2002 ◽

Vol 82 (9) ◽

pp. 1741-1768 ◽

Cited By ~ 4

Author(s):

J. W. Steeds ◽

A. E. Mora ◽

J. E. Butler ◽

K. M. Bussmann

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transmission Electron Microscopy Investigation ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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Transmission electron microscopy investigation of texture development in magnesium oxide buffer layers

IEEE Transactions on Applied Superconductivity ◽

10.1109/77.919811 ◽

2001 ◽

Vol 11 (1) ◽

pp. 3473-3476 ◽

Cited By ~ 18

Author(s):

R.E. Koritala ◽

M.P. Chudzik ◽

Zhiping Luo ◽

D.J. Miller ◽

C.R. Kannewurf ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Magnesium Oxide ◽

Buffer Layers ◽

Texture Development ◽

Transmission Electron Microscopy Investigation ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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In situ scanning and transmission electron microscopy investigation on plastic deformation in a metastable β titanium alloy

Acta Materialia ◽

10.1016/j.actamat.2017.05.018 ◽

2017 ◽

Vol 133 ◽

pp. 21-29 ◽

Cited By ~ 36

Author(s):

Tingting Yao ◽

Kui Du ◽

Haoliang Wang ◽

Zhiye Huang ◽

Cuihong Li ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Plastic Deformation ◽

Titanium Alloy ◽

Transmission Electron Microscopy Investigation ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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In Situ Liquid Cell Transmission Electron Microscopy Investigation on the Dissolution-Regrowth Mechanism Dominating the Shape Evolution of Silver Nanoplates

Crystal Growth & Design ◽

10.1021/acs.cgd.0c01573 ◽

2021 ◽

Author(s):

Meng Dong ◽

Ruining Fu ◽

Huihua Min ◽

Qiubo Zhang ◽

Hui Dong ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Shape Evolution ◽

Transmission Electron Microscopy Investigation ◽

Silver Nanoplates ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation ◽

Liquid Cell

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High-resolution transmission electron microscopy investigation of interfaces in metal-silicon systems

Ultramicroscopy ◽

10.1016/0304-3991(94)90114-7 ◽

1994 ◽

Vol 54 (2-4) ◽

pp. 156-165 ◽

Cited By ~ 7

Author(s):

L.J. Chen ◽

J.M. Liang ◽

C.S. Liu ◽

W.Y. Hsieh ◽

J.H. Lin ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

High Resolution ◽

Transmission Electron Microscopy Investigation ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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Transmission electron microscopy investigation and first-principles calculation of the phase stability in epitaxial CuInS2 and CuGaSe2 films

Applied Physics Letters ◽

10.1063/1.123014 ◽

1999 ◽

Vol 74 (17) ◽

pp. 2483-2485 ◽

Cited By ~ 40

Author(s):

D. S. Su ◽

Su-Huai Wei

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Phase Stability ◽

First Principles ◽

First Principles Calculation ◽

Transmission Electron Microscopy Investigation ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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5403. Transmission electron microscopy investigation of silicide formation on slightly oxidized silicon substrates

Vacuum ◽

10.1016/0042-207x(82)93999-9 ◽

1982 ◽

Vol 32 (12) ◽

pp. 773-774

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Silicon Substrates ◽

Transmission Electron Microscopy Investigation ◽

Silicide Formation ◽

Transmission Electron ◽

Microscopy Investigation ◽

Electron Microscopy Investigation

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