Ion bombardment energy distributions in radio‐frequency glow‐discharge systems
Keyword(s):
1997 ◽
Vol 52
(11)
◽
pp. 1627-1644
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1995 ◽
Vol 50
(4-7)
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pp. 617-638
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2017 ◽
Vol 10
(1)
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pp. 381-388
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Keyword(s):
2018 ◽
Vol 442
◽
pp. 412-416
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Keyword(s):