Dual ion implantation technique for formation of shallowp+/njunctions in silicon
1983 ◽
Vol 104
(3-4)
◽
pp. 383-389
◽
2006 ◽
Vol 53
(8)
◽
pp. 641-646
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Keyword(s):
1975 ◽
Vol 10
(4)
◽
pp. 205-211
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