Effect of deposition temperature on surface morphology and magnetic properties in epitaxial CoFe2O4 thin films deposited by metal organic chemical vapor deposition

2010 ◽  
Vol 107 (4) ◽  
pp. 043908 ◽  
Author(s):  
M. Pan ◽  
G. Bai ◽  
Y. Liu ◽  
S. Hong ◽  
V. P. Dravid ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetic Properties ◽  
Chemical Vapor Deposition ◽  
Surface Morphology ◽  
Vapor Deposition ◽  
Deposition Temperature ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

A Drastic Change in Structure and Property of TiO2 Thin Films Deposited by Metal-Organic Chemical Vapor Deposition With Deposition Temperature

2000 ◽  
Vol 616 ◽  
Author(s):  
Jeong-Hoon Park ◽  
Woon-Jo Cho ◽  
Kug-Sun Hong
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Refractive Index ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Deposition Temperature ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

AbstractTiO2 thin films were deposited by metal-organic chemical vapor deposition (MOCVD) method using titanium tetraisopropoxide(TTIP). A drastic change in structural aspect and its property occurred when the deposition temperature increased above 400°C. Deposition kinetics was proved to transit from reaction controlled regime into diffusion controlled regime above about 400°C in Arrehnius plot. In X-ray diffraction (XRD)and infrared reflectance spectra, it was observed that the crystallinity was decreased significantly around 400°C. The surface microstructure has changed explicitly from dense structure with larger grains to porous one with smaller grains observed by scanning electron microscopy and transmission electron microscopy. Electrical resistance of the films jumped by 2 orders of magnitude, which is measured by the 4-point probe method. The refractive index calculated by Swanepoel's method has decreased from 2.45 to 2.28 at 630nm. The porous microstructure of films deposited at above 400°C was thought to be responsible for the significant decrease in electrical conductivity and refractive index of the films.

Growth of (Ni,Zn)Fe2O4 Thin Films by Liquid Delivery Metal-Organic Chemical Vapor Deposition

1999 ◽  
Vol 574 ◽  
Author(s):  
D. Gangaware ◽  
R. Woolcott ◽  
A. I. Kingon ◽  
J. F. Roeder ◽  
T. H. Baum
Keyword(s):  
Thin Films ◽  
Magnetic Properties ◽  
Chemical Vapor Deposition ◽  
Saturation Magnetization ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition ◽  
Liquid Delivery

AbstractNi,Zn-ferrite (NZF) thin films are of interest for high frequency applications because of their high saturation magnetization compared to garnet films and their low eddy current losses compared to metal alloy films. Therefore there is an increasing need for methods to deposit single crystal ferrite thin films for incorporation into next generation microwave devices.Epitaxial thin films of NZF have been deposited by liquid delivery metal-organic chemical vapor deposition onto (100) oriented MgO substrates. The morphology, orientation and magnetic properties of the as-deposited films were investigated as a function of deposition temperature and pressure. X-ray diffraction (XRD) reveals highly oriented films with a film strain of 1.01% compared to bulk lattice parameters. Films with well saturated magnetic hysteresis were obtained under a number of conditions with values of saturation magnetization up to 270 emu/cc (3400 gauss) with relatively low coercive fields ~100 Oe. The influence of metal cation ratio on magnetic properties is discussed.

Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

2007 ◽  
Vol 515 (5) ◽  
pp. 2921-2925 ◽  
Author(s):  
Chunyu Wang ◽  
Volker Cimalla ◽  
Genady Cherkashinin ◽  
Henry Romanus ◽  
Majdeddin Ali ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Indium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Transparent Conducting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Study on ZrO2:Er Thin Films Fabricated by Metal-Organic Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 5A) ◽  
pp. 2839-2842 ◽  
Author(s):  
Jeong Hoon Park ◽  
Kug Sun Hong ◽  
Woon Jo Cho ◽  
Jang-Hoon Chung
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Metal organic chemical vapor deposition of m-plane GaN epi-layer using a three-step approach towards enhanced surface morphology

2018 ◽  
Vol 667 ◽  
pp. 48-54
Author(s):  
Adreen Azman ◽  
Ahmad Shuhaimi ◽  
Al-Zuhairi Omar ◽  
Anas Kamarundzaman ◽  
Muhammad Imran Mustafa Abdul Khudus ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Surface Morphology ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition ◽  
Enhanced Surface
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