Secondary ion mass spectrometry study of lightly dopedp‐type GaAs films grown by molecular beam epitaxy

1982 ◽  
Vol 53 (6) ◽  
pp. 4518-4520 ◽  
Author(s):  
J. B. Clegg ◽  
C. T. Foxon ◽  
G. Weimann
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Secondary Ion Mass Spectrometry ◽  
Mass Spectrometry Study ◽  
Ion Mass Spectrometry ◽  
Gaas Films ◽  
Secondary Ion

Secondary‐ion mass spectrometry on δ‐doped GaAs grown by molecular beam epitaxy

1990 ◽  
Vol 57 (17) ◽  
pp. 1799-1801 ◽  
Author(s):  
E. F. Schubert ◽  
H. S. Luftman ◽  
R. F. Kopf ◽  
R. L. Headrick ◽  
J. M. Kuo
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Near-Surface Aggregation of Sn In Heavily Sn-Doped GaAs Films Grown By Molecular Beam Epitaxy

1985 ◽  
Vol 43 ◽  
pp. 368-369
Author(s):  
S. H. Chen
Keyword(s):  
Molecular Beam Epitaxy ◽  
Cross Section ◽  
Electron Spectroscopy ◽  
Molecular Beam ◽  
Surface Segregation ◽  
Secondary Ion Mass Spectrometry ◽  
Specimen Preparation ◽  
Near Surface ◽  
Gaas Films ◽  
Secondary Ion

Sn has been used extensively as an n-type dopant in GaAs grown by molecular-beam epitaxy (MBE). The surface accumulation of Sn during the growth of Sn-doped GaAs has been observed by several investigators. It is still not clear whether the accumulation of Sn is a kinetically hindered process, as proposed first by Wood and Joyce, or surface segregation due to thermodynamic factors. The proposed donor-incorporation mechanisms were based on experimental results from such techniques as secondary ion mass spectrometry, Auger electron spectroscopy, and C-V measurements. In the present study, electron microscopy was used in combination with cross-section specimen preparation. The information on the morphology and microstructure of the surface accumulation can be obtained in a fine scale and may confirm several suggestions from indirect experimental evidence in the previous studies.

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