Chemical bonding effects on the local vibrations in fluorinated and hydrogenated amorphous silicon

1981 ◽  
Author(s):  
G. Lucovsky
Keyword(s):  
Amorphous Silicon ◽  
Chemical Bonding ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous

Nitrogen: Not a Dopant in Crystalline Si (C-Si), But an N-Type Dopant in A-Si:H, Why?

1994 ◽  
Vol 336 ◽  
Author(s):  
G. Lucovsky ◽  
M.J. Williams ◽  
S.S. He ◽  
S.M. Cho ◽  
Z. Jing ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Chemical Bonding ◽  
Nearest Neighbor ◽  
Hydrogenated Amorphous Silicon ◽  
Statistical Association ◽  
Ir Studies ◽  
Local Bonding ◽  
Bonding Properties ◽  
Hydrogenated Amorphous

ABSTRACTWe have incorporated N-atoms into hydrogenated amorphous silicon in the Si-rich alloy regime to ∼12 at.% N, and have observed a transition from n-type doping to alloying as the concentration of N-atoms is increased above about 5 at.%. By analogy with the local bonding arrangements of P-donors in n-doped a-Si:H, we attribute the doping to four-fold coordinated N-atoms with second neighbor H-atoms as in N+-Si-H linkages. The occurrence of these arrangements is supported by (i) IR studies which indicate a non-statistical association of N and H-atoms bonded to the same Si-atom, and (ii) a chemical bonding model in which the large effective electronegativies of four-fold coordinated N+ atoms and neutral O-atoms promote similar bonding properties with respect to their nearest-neighbor arrangements with Si and H atoms such as N+ (O) -Si-H linkages

BONDING IN HYDROGENATED AMORPHOUS SILICON

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-773-C4-777 ◽  
Author(s):  
H. R. Shanks ◽  
F. R. Jeffrey ◽  
M. E. Lowry
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous

High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

2003 ◽  
Vol 762 ◽  
Author(s):  
Guofu Hou ◽  
Xinhua Geng ◽  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Junming Xue ◽  
...  
Keyword(s):  
Phase Transition ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Very High Frequency ◽  
High Quality ◽  
Working Pressure ◽  
Hydrogen Dilution ◽  
Hydrogenated Amorphous

AbstractHigh rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

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