Simple stress formula for multilayered thin films on a thick substrate

1982 ◽  
Vol 53 (3) ◽  
pp. 1536-1537 ◽  
Author(s):  
J. Vilms ◽  
D. Kerps
1987 ◽  
Vol 91 ◽  
Author(s):  
E. Suhir

ABSTRACTThe analysis contains an engineering method for the prediction of thermally induced stresses in single- and multilayered heteroepitaxial structures on a thick substrate. The examined stresses include 1) normal stresses acting in the film layers themselves and responsible for their ultimate and fatigue strength, and 2) interfacial stresses responsible for film blistering and peeling. The developed formulas are simple, visible, easy-to-use, and clearly indicate how material and structural characteristics affect the magnitude and the distribution of stresses and deflections. Some recommendations for smaller stresses in film structures are presented. The obtained results can be utilized as a guidance for an optimal physical design of multilayered heteroepitaxial structures used in Microelectronics.


2005 ◽  
Vol 123 ◽  
pp. 137-142 ◽  
Author(s):  
J. Takadoum ◽  
J. Lintymer ◽  
J. Gavoille ◽  
N. Martin

1996 ◽  
Vol 457 ◽  
Author(s):  
R. Banerjee ◽  
X. D. Zhang ◽  
S. A. Dregia ◽  
H. L. Fraser

ABSTRACTNanocomposite Ti/Al multilayered thin films have been deposited by magnetron sputtering. These multilayers exhibit interesting structural transitions on reducing the layer thickness of both Ti and Al. Ti transforms from its bulk stable hep structure to fee and Al transforms from fee to hep. The effect of ratio of Ti layer thickness to Al layer thickness on the structural transitions has been investigated for a constant bilayer periodicity of 10 nm by considering three different multilayers: 7.5 nm Ti / 2.5 nm Al, 5 nm Ti / 5 nm Al and 2.5 nm Ti / 7.5 nm Al. The experimental results have been qualitatively explained on the basis of a thermodynamic model. Preliminary experimental results of interfacial reactions in Ti/Al bilayers resulting in the formation of Ti-aluminides are also presented in the paper.


1989 ◽  
Vol 40 (12) ◽  
pp. 8256-8269 ◽  
Author(s):  
M. B. Stearns ◽  
C. H. Lee ◽  
T. L. Groy

1992 ◽  
Vol 117 (1-2) ◽  
pp. 294-300 ◽  
Author(s):  
Eiji Kita ◽  
Makoto Ochi ◽  
Tomoki Erata ◽  
Akira Tasaki

1994 ◽  
Vol 75 (10) ◽  
pp. 5807-5807 ◽  
Author(s):  
D. Weller ◽  
M. G. Samant ◽  
J. Stöhr ◽  
Y. Wu ◽  
B. D. Hermsmeier ◽  
...  

Metals ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 514 ◽  
Author(s):  
Yung-I Chen ◽  
Zhi-Ting Zheng ◽  
Jia-Wei Jhang

2009 ◽  
pp. 9426 ◽  
Author(s):  
Oxana V. Vassiltsova ◽  
Subhendu K. Panda ◽  
Zhouying Zhao ◽  
Michael A. Carpenter ◽  
Marina A. Petrukhina

Langmuir ◽  
2010 ◽  
Vol 26 (22) ◽  
pp. 17248-17255 ◽  
Author(s):  
Carole Cerclier ◽  
Fabrice Cousin ◽  
Hervé Bizot ◽  
Céline Moreau ◽  
Bernard Cathala

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