Design and control of six degree-of-freedom active vibration isolation table

2010 ◽  
Vol 81 (3) ◽  
pp. 035106 ◽  
Author(s):  
Jinpyo Hong ◽  
Kyihwan Park
Keyword(s):  
Vibration Isolation ◽  
Degree Of Freedom ◽  
Active Vibration ◽  
Six Degree Of Freedom ◽  
And Control ◽  
Active Vibration Isolation

Design of a VCM Actuator Using Halbach Magnet Array for Active Vibration Isolation System

2014 ◽  
Vol 945-949 ◽  
pp. 1465-1469 ◽  
Author(s):  
Myeong Hyeon Kim ◽  
Hyun Chang Kim ◽  
Dong Pyo Hong ◽  
Dae Gab Gweon
Keyword(s):  
Vibration Isolation ◽  
Voice Coil Motor ◽  
Force Density ◽  
Maximum Output ◽  
Isolation System ◽  
Vibration Isolation System ◽  
Design Variables ◽  
Active Vibration ◽  
Six Degree Of Freedom ◽  
Active Vibration Isolation

This paper proposes the concept development and design of a VCM actuator for Active Vibration Isolation System (AVIS). Active vibration isolating method was constructed passive isolator and active isolator. Spring was used for isolating passively and actuator like voice coil motor was used for active isolating. The proposed active vibration isolating system could isolate a six degree-of-freedom disturbance effectively. In case of AVIS, payload is variable according to the type of instruments. Therefore, actuator should maintain uniform performance with payload change. The proposed VCM actuator satisfied this performance through relative relation between magnet array and coils. In addition, for maximizing actuator performance, actuator should generate large force density. Therefore, we apply the Halbach magnet array to proposed actuator. The Halbach magnet array helps with reinforcing magnetic flux field. The reinforced magnetic field takes a role to generate more powerful Lorentz force to isolate disturbance. Finally, in this paper, we propose the actuator that novel type using voice coil motor with the Halbach magnet array and optimize each design variables to generate maximum output. These AVIS can use to eliminate disturbance in Maglev stage. Maglev stage need AVIS to increase its performance is necessary. In the future, AVIS and Maglev system will be integrated.

scholarly journals Active Vibration Isolation of Multi-Degree-of-Freedom Systems

1999 ◽  
Vol 5 (4) ◽  
pp. 577-589 ◽  
Author(s):  
Wassim M. Haddad ◽  
Ali Razavi ◽  
David C. Hyland
Keyword(s):  
Vibration Isolation ◽  
Degree Of Freedom ◽  
Active Vibration ◽  
Active Vibration Isolation
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