Effect of silicon dioxide surface‐layer thickness on boron profiles for directly aligned implants into (100) silicon
2019 ◽
Vol 1281
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pp. 012057
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Keyword(s):
1977 ◽
Vol 437
(1)
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pp. 293-298
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Keyword(s):
2012 ◽
Vol 42
(8)
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pp. 1270-1287
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1976 ◽
Vol 102
(5_6)
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pp. 221-230
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