Characterization of pulsed Nd:YAG laser‐annealed, arsenic‐ion‐implanted silicon

1981 ◽  
Vol 52 (2) ◽  
pp. 1038-1049 ◽  
Author(s):  
J. S. Williams ◽  
W. L. Brown ◽  
G. K. Celler ◽  
H. J. Leamy ◽  
J. M. Poate ◽  
...  
2020 ◽  
Vol 128 ◽  
pp. 106256 ◽  
Author(s):  
Morteza Shamanian ◽  
Majid Valehi ◽  
Jalal Kangazian ◽  
Jerzy A. Szpunar

2000 ◽  
Vol 39 (Part 1, No. 7B) ◽  
pp. 4575-4576 ◽  
Author(s):  
Yoshiaki Suda ◽  
Hiroharu Kawasaki ◽  
Choong-Rae Cho ◽  
Alex Grishin ◽  
K. V. Rao

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