Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering

1980 ◽  
Vol 51 (6) ◽  
pp. 3113-3120 ◽  
Author(s):  
Takashi Yamamoto ◽  
Tadashi Shiosaki ◽  
Akira Kawabata
Keyword(s):  
Magnetron Sputtering ◽  
Planar Magnetron ◽  
Piezoelectric Films

rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3films

1983 ◽  
Vol 54 (11) ◽  
pp. 6601-6609 ◽  
Author(s):  
S. B. Krupanidhi ◽  
N. Maffei ◽  
M. Sayer ◽  
K. El‐Assal
Keyword(s):  
Magnetron Sputtering ◽  
Planar Magnetron

Characterization of Amorphous Si: H Films Prepared by rf Planar Magnetron Sputtering

1982 ◽  
Vol 21 (S2) ◽  
pp. 209 ◽  
Author(s):  
Takao Nagatomo ◽  
Shunji Moribe ◽  
Masaaki Usui ◽  
Osamu Omoto
Keyword(s):  
Magnetron Sputtering ◽  
Planar Magnetron ◽  
Amorphous Si

Low Temperature Growth of Piezoelectric Films by RF Reactive Planar Magnetron Sputtering

1981 ◽  
Vol 20 (S3) ◽  
pp. 149 ◽  
Author(s):  
Tadashi Shiosaki ◽  
Takashi Yamamoto ◽  
Takafumi Oda ◽  
Kazushige Harada ◽  
Akira Kawabata
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Planar Magnetron ◽  
Piezoelectric Films

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

scholarly journals Epitaxial growth and characterization of Cu thin films deposited on Al2O3(0001) substrates by magnetron sputtering

2021 ◽  
pp. 130119
Author(s):  
Ik-Jae Lee ◽  
Hee Seob Kim ◽  
Young Duck Yun ◽  
Seen-Woong Kang ◽  
Hyo-Yun Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth
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