Molecular‐weight dependence of developed contours in poly‐ (methyl methacrylate) electron resists

1979 ◽  
Vol 50 (5) ◽  
pp. 3707-3712 ◽  
Author(s):  
Nobufumi Atoda ◽  
Masanori Komuro ◽  
Hisazo Kawakatsu
e-Polymers ◽  
2008 ◽  
Vol 8 (1) ◽  
Author(s):  
Dong Chen ◽  
Ruixue Liu ◽  
Zhifeng Fu ◽  
Yan Shi

AbstractAmphiphilic diblock copolymer poly(methyl methacrylate)-b-poly(acrylic acid) (PMMA-b-PAA) was prepared by 1,1-diphenylethene (DPE) method. Firstly, free radical polymerization of methyl methacrylate was carried out with AIBN as initiator in the presence of DPE, giving a DPE-containing PMMA precursor with controlled molecular weight. tert-Butyl acrylate (tBA) was then polymerized in the presence of the PMMA precursor, and PMMA-b-PtBA diblock copolymer with controlled molecular weight was prepared. Finally, amphiphilic diblock copolymer PMMA-b-PAA was obtained by hydrolysis of PMMA-b-PtBA. The formation of PMMA-b-PAA was confirmed by 1H NMR spectrum and gel permeation chromatography. Transmission electron microscopy and dynamic light scattering were used to detect the self-assembly behavior of the amphiphilic diblock polymers in methanol.


2016 ◽  
Vol 134 (1) ◽  
Author(s):  
Keishi Naito ◽  
Akiyoshi Takeno ◽  
Ryota Morifuji ◽  
Toshiaki Miyata ◽  
Minoru Miwa ◽  
...  

2008 ◽  
Vol 85 (1) ◽  
pp. 93-99 ◽  
Author(s):  
A. Kokkinis ◽  
E.S. Valamontes ◽  
D. Goustouridis ◽  
Th. Ganetsos ◽  
K. Beltsios ◽  
...  

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