Ferroelectric relaxor behavior and microwave dielectric properties of Ba(Zr0.3Ti0.7)O3 thin films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 074107 ◽  
Author(s):  
Jin Xu ◽  
Dayu Zhou ◽  
W. Menesklou ◽  
E. Ivers-Tiffée
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Microwave Dielectric Properties ◽  
Radio Frequency Magnetron ◽  
Relaxor Behavior ◽  
Radio Frequency Magnetron Sputtering ◽  
Ferroelectric Relaxor ◽  
Microwave Dielectric

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries
Sign in / Sign up

Export Citation Format

Share Document