Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films

Sumeet C. Pandey; Tejinder Singh; Dimitrios Maroudas

doi:10.1063/1.3152846

Kinetic Monte Carlo simulations of surface growth during plasma deposition of silicon thin films

The Journal of Chemical Physics ◽

10.1063/1.3152846 ◽

2009 ◽

Vol 131 (3) ◽

pp. 034503 ◽

Cited By ~ 15

Author(s):

Sumeet C. Pandey ◽

Tejinder Singh ◽

Dimitrios Maroudas

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Plasma Deposition ◽

Kinetic Monte Carlo ◽

Surface Growth ◽

Silicon Thin Films ◽

Kinetic Monte Carlo Simulations

Download Full-text

Surface smoothing of amorphous silicon thin films: Kinetic Monte Carlo simulations

Physical Review B ◽

10.1103/physrevb.73.195322 ◽

2006 ◽

Vol 73 (19) ◽

Cited By ~ 17

Author(s):

X. Tan ◽

G. Ouyang ◽

G. W. Yang

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Amorphous Silicon ◽

Kinetic Monte Carlo ◽

Surface Smoothing ◽

Silicon Thin Films ◽

Kinetic Monte Carlo Simulations

Download Full-text

Effects of growth conditions on heteroepitaxial thin films: Fast kinetic Monte Carlo simulations

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2014.09.050 ◽

2015 ◽

Vol 409 ◽

pp. 27-31 ◽

Cited By ~ 4

Author(s):

M. Klawtanong ◽

C. Srinitiwarawong ◽

P. Chatraphorn

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Growth Conditions ◽

Kinetic Monte Carlo Simulations ◽

Fast Kinetic

Download Full-text

Kinetic Monte Carlo simulations of stress and morphology evolution in polycrystalline thin films

Journal of Applied Physics ◽

10.1063/1.5085313 ◽

2019 ◽

Vol 125 (11) ◽

pp. 115304 ◽

Cited By ~ 4

Author(s):

Eric Chason ◽

Allan F. Bower

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Morphology Evolution ◽

Polycrystalline Thin Films ◽

Kinetic Monte Carlo Simulations

Download Full-text

Kinetic Monte Carlo simulations for the submonolayer growth of homoepitaxial SrTiO 3 thin films

Micro & Nano Letters ◽

10.1049/mnl.2018.5196 ◽

2018 ◽

Vol 13 (10) ◽

pp. 1497-1500 ◽

Cited By ~ 3

Author(s):

Lirong Huang

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Kinetic Monte Carlo Simulations

Download Full-text

Kinetic Monte Carlo Simulations of Submonolayer Growth of NiTi Alloy Thin Films

Journal of Computational and Theoretical Nanoscience ◽

10.1166/jctn.2010.1505 ◽

2010 ◽

Vol 7 (8) ◽

pp. 1469-1474 ◽

Cited By ~ 4

Author(s):

Y. G. Zhu ◽

H. B. Rong

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Niti Alloy ◽

Kinetic Monte Carlo ◽

Kinetic Monte Carlo Simulations

Download Full-text

Growth mode transition of Ni thin films on nanopatterned substrate: Kinetic Monte Carlo simulations

Applied Surface Science ◽

10.1016/j.apsusc.2012.01.068 ◽

2012 ◽

Vol 258 (11) ◽

pp. 4857-4860 ◽

Cited By ~ 2

Author(s):

Shuhan Chen ◽

Jingshu Liang ◽

Yuan Zhu ◽

Shaoji Jiang

Keyword(s):

Thin Films ◽

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Growth Mode ◽

Mode Transition ◽

Kinetic Monte Carlo Simulations

Download Full-text

Stochastic Perturbation Algorithms for Kinetic Monte Carlo Simulations

SNA + MC 2013 - Joint International Conference on Supercomputing in Nuclear Applications + Monte Carlo ◽

10.1051/snamc/201403407 ◽

2014 ◽

Author(s):

Hyung Jin Shim

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Stochastic Perturbation ◽

Kinetic Monte Carlo Simulations

Download Full-text

Zero-variance schemes for kinetic Monte Carlo simulations

The European Physical Journal Plus ◽

10.1140/epjp/s13360-020-00387-8 ◽

2020 ◽

Vol 135 (5) ◽

Cited By ~ 1

Author(s):

Davide Mancusi ◽

Andrea Zoia

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Kinetic Monte Carlo Simulations

Download Full-text

Kinetic Monte Carlo simulations of vacancy diffusion in nondilute Ni- X ( X = Re, W, Ta) alloys

Physical Review Materials ◽

10.1103/physrevmaterials.2.123403 ◽

2018 ◽

Vol 2 (12) ◽

Cited By ~ 3

Author(s):

Maximilian Grabowski ◽

Jutta Rogal ◽

Ralf Drautz

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Vacancy Diffusion ◽

Kinetic Monte Carlo Simulations

Download Full-text

Kinetic Monte Carlo Simulations of the Grain-surface Back-diffusion Effect

The Astrophysical Journal ◽

10.3847/1538-4357/aa6ea7 ◽

2017 ◽

Vol 840 (2) ◽

pp. 61 ◽

Cited By ~ 10

Author(s):

Eric R. Willis ◽

Robin T. Garrod

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Back Diffusion ◽

Diffusion Effect ◽

Kinetic Monte Carlo Simulations ◽

Grain Surface

Download Full-text