AlN/AlGaN short-period superlattice sacrificial layers in laser lift-off for vertical-type AlGaN-based deep ultraviolet light emitting diodes
2003 ◽
Vol 42
(Part 2, No. 11B)
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pp. L1362-L1365
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2020 ◽
Vol 13
(10)
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pp. 102005
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2010 ◽
Vol 4
(1-2)
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pp. 49-51
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2015 ◽
Vol 85
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pp. 59-66
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