SIMS∕ARXPS—A New Technique of Retained Dopant Dose and Profile Measurement of Low Energy Doping Processes

Author(s):  
Shu Qin ◽  
Kent Zhuang ◽  
Shifeng Lu ◽  
Allen McTeer ◽  
Wendy Morinville ◽  
...  
1984 ◽  
Vol 17 (24) ◽  
pp. L877-L883 ◽  
Author(s):  
G Astner ◽  
A Barany ◽  
H Cederquist ◽  
H Danared ◽  
S Huldt ◽  
...  

1967 ◽  
Vol 52 (2) ◽  
pp. 321-324 ◽  
Author(s):  
T.J. King ◽  
R.R. Fullwood ◽  
R.C. Block

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