Internal stresses in TiN/Ti multilayer coatings deposited by large area filtered arc deposition

2008 ◽  
Vol 104 (9) ◽  
pp. 093502 ◽  
Author(s):  
Y. H. Cheng ◽  
T. Browne ◽  
B. Heckerman ◽  
J. C. Jiang ◽  
E. I. Meletis ◽  
...  
Keyword(s):  
Internal Stresses ◽  
Multilayer Coatings ◽  
Large Area ◽  
Arc Deposition

Elucidation of PVD MoS2 film formation process and its structure focusing on sub-monolayer region

2021 ◽  
Author(s):  
Ryo Ono ◽  
Shinya Imai ◽  
Yuta Kusama ◽  
Takuya Hamada ◽  
Masaya Hamada ◽  
...  
Keyword(s):  
Vapor Deposition ◽  
Formation Process ◽  
Physical Vapor Deposition ◽  
Film Formation ◽  
Dark Field ◽  
Film Structure ◽  
Internal Stresses ◽  
Large Area ◽  
Scanning Transmission ◽  
Annular Dark Field

Abstract Sputtering enables uniform and clean deposition over a large area, which is an issue with exfoliation and chemi-cal vapor deposition methods. On the other hand, the process of physical vapor deposition (PVD) film formationhas not yet been clarified. We prepared several samples from the sub-monolayer region, and performed Ra-man spectroscopy, X-ray photon spectroscopy and high-angle annular dark-field scanning transmission electronmicroscopy. From these results, the internal stresses inherent to PVD films, the bonding states specific to sub-monolayers, and the unique film structure and the grain formation process of PVD films were discussed fromthe perspective of sub-monolayers. As a conclusion, we found that it is important to suppress the formation ofsub-monolayers on the substrate to completely form the first layer.

Vacuum Arc Deposition of Nanostructured Multilayer Coatings for Biomedical Applications

2008 ◽  
Vol 8 (2) ◽  
pp. 733-738 ◽  
Author(s):  
A. Vladescu ◽  
A. Kiss ◽  
M. Braic ◽  
C. M. Cotrut ◽  
P. Drob ◽  
...  
Keyword(s):  
Shape Memory Alloys ◽  
Shape Memory ◽  
Smart Materials ◽  
Complete Characterization ◽  
Nickel Titanium ◽  
Vacuum Arc ◽  
Multilayer Coatings ◽  
Dissolved Ions ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

In recent years, the smart materials have attracted much attention due to their unusual properties such as shape memory effect and pseudoelasticity, being widely used for biomedical implants. These materials contain certain amounts of nickel, titanium and others which are not adequate for surgical implants and prosthesis. In the work reported here, two types of nonostructured multilayer coatings (TiN/ZrN, ZrN/Zr) used to prevent the ions release from shape memory alloys were investigated. For comparison, the TiN and ZrN monolayers were also examined. The films were deposited onto nickel-titanium based alloy (Ti-Ni-Nb) and Ni substrates by vacuum arc deposition technique under various deposition conditions. The concentrations of dissolved ions in Ringer solution for uncoated and coated Ni samples were determined to examine the benefic barrier effect of these coatings for ions release from shape memory alloys. In order to have a more complete characterization of the investigated coatings, other properties such as elemental and phase composition, morphology, texture, microhardness, and adhesion were studied. For all coatings, the concentrations of dissolved ions were lower that those measured in the case of the uncoated specimens. The nanostructured multilayer films exhibited the best mechanical and anticorrosive properties.

Characterization of large area filtered arc deposition technology: part II — coating properties and applications

2001 ◽  
Vol 140 (3) ◽  
pp. 215-224 ◽  
Author(s):  
Vladimir I. Gorokhovsky ◽  
Deepak G. Bhat ◽  
Rajiv Shivpuri ◽  
Kaustabh Kulkarni ◽  
Rabi Bhattacharya ◽  
...  
Keyword(s):  
Coating Properties ◽  
Large Area ◽  
Arc Deposition ◽  
Deposition Technology

Large-area diamond-like carbon films prepared by pulsed vacuum arc deposition on silicon lens

2006 ◽  
Author(s):  
Hai-feng Liang ◽  
Yi-xin Yan ◽  
Qian Mi ◽  
Jun-qi Xu ◽  
Chang-long Cai
Keyword(s):  
Carbon Films ◽  
Vacuum Arc ◽  
Diamond Like Carbon ◽  
Large Area ◽  
Silicon Lens ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

scholarly journals Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O / Si-Al-N

2014 ◽  
Author(s):  
Marina V. Fedorischeva ◽  
Victor P. Sergeev ◽  
Mark P. Kalashnikov ◽  
Andrei V. Voronov
Keyword(s):  
Internal Stresses ◽  
Multilayer Coatings
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