Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young’s modulus change

2008 ◽  
Vol 104 (7) ◽  
pp. 074503 ◽  
Author(s):  
Wan Y. Shih ◽  
Qing Zhu ◽  
Wei-Heng Shih
Keyword(s):  
Resonance Frequency ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Thickness Dependence ◽  
Frequency Shifts ◽  
Piezoelectric Microcantilever

scholarly journals Magnetic Properties, Adhesion, and Nanomechanical Property of Co40Fe40W20 Films on Si (100) Substrate

2020 ◽  
Vol 2020 ◽  
pp. 1-11
Author(s):  
Wen-Jen Liu ◽  
Yung-Huang Chang ◽  
Sin-Liang Ou ◽  
Yuan-Tsung Chen ◽  
You-Cheng Liang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Surface Energy ◽  
Resonance Frequency ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
High Surface ◽  
Contact Angles ◽  
Thickness Effect ◽  
High Coercivity ◽  
High Surface Energy

In this study, a Co40Fe40W20 alloy was sputtered onto Si (100) with thicknesses (tf) ranging from 18 to 90 nm, and the corresponding structure, magnetic properties, adhesive characteristics, and nanomechanical properties were investigated. X-ray diffraction (XRD) patterns of the Co40Fe40W20 films demonstrated a significant crystalline body-centered cubic (BCC) CoFe (110) structure when the thickness was 42 nm, and an amorphous status was shown when the thickness was 18 nm, 30 nm, 60 nm, and 90 nm. The saturation magnetization (Ms) showed a saturated trend as tf was increased. Moreover, the coercivity (Hc) showed a minimum 1.65 Oe with 30 nm. Hc was smaller than 4.5 Oe owing to the small grain size distribution and amorphous structure, indicating that the Co40Fe40W20 film had soft magnetism. The low-frequency alternating current magnetic susceptibility (χac) decreased as the frequency was increased. The χac revealed a thickness effect when greater thicknesses had a large χac. The maximum χac and optimal resonance frequency (fres) of Co40Fe40W20 were investigated. The maximum χac indicated the spin sensitivity and was maximized at the optimal resonance frequency. The 90 mm thickness had the highest χac 0.18 value at an fres of 50 Hz. The contact angles of the Co40Fe40W20 films are less than 90°, which indicated that the film had a good wetting effect and hydrophilicity. The surface energy was correlated with the adhesion and displayed a concave-down trend. CoFeW films can be used as a seed or buffer layer; therefore, the surface energy and adhesion are very important. The highest surface energy was 30.12 mJ/mm2 at 42 nm and demonstrated high adhesion. High surface energy has corresponding strong adhesive performance. The increased surface roughness can induce domain wall pinning effect and high surface energy, causing a high coercivity and strong adhesion. The increase of hardness and Young’s modulus could be reasonably inferred from the thinner CoFeW films. The hardness and Young’s modulus of CoFeW films are also displayed to saturated tendency when increasing thickness.

An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency

2012 ◽  
Vol 503 ◽  
pp. 308-311
Author(s):  
Han Chen ◽  
Hua Rong
Keyword(s):  
Thin Film ◽  
Resonance Frequency ◽  
Young’S Modulus ◽  
Circular Plate ◽  
Material Property ◽  
Young's Modulus ◽  
Measuring Method ◽  
Test Structure ◽  
Film Research

Large-scale measurement of material property is not suit for the MEMS thin-film. Research the in-situ measuring method for material property of the MEMS thin-film is urgently. A center-anchored circular plate is adopted as the test structure here. The resonance frequency of the circular plate is measured to extract the Young’s modulus of a MEMS thin-film. The accuracy of this non-contact in-situ measuring method has been verified by CoventorWare. The inferences of the stress gradient have been analyzed. The advantages of the test structure and the measuring method present here also have been discussed.

Thickness Dependence of the Young’s Modulus of Polymer Thin Films

2018 ◽  
Vol 51 (17) ◽  
pp. 6764-6770 ◽  
Author(s):  
Jooyoung Chang ◽  
Kamil B. Toga ◽  
Joseph D. Paulsen ◽  
Narayanan Menon ◽  
Thomas P. Russell
Keyword(s):  
Thin Films ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Polymer Thin Films ◽  
Thickness Dependence

scholarly journals Frequency Dependency of the Delta-E Effect and the Sensitivity of Delta-E Effect Magnetic Field Sensors

Sensors ◽  
2019 ◽  
Vol 19 (21) ◽  
pp. 4769 ◽  
Author(s):  
Spetzler ◽  
Golubeva ◽  
Müller ◽  
McCord ◽  
Faupel
Keyword(s):  
Magnetic Field ◽  
Resonance Frequency ◽  
Young’S Modulus ◽  
Ferromagnetic Resonance ◽  
Young's Modulus ◽  
Gilbert Damping ◽  
Simple Description ◽  
Frequency Dependency ◽  
Magnetic Sensitivity ◽  
Ferromagnetic Resonance Frequency

In recent years the delta-E effect has been used for detecting low frequency and low amplitude magnetic fields. Delta-E effect sensors utilize a forced mechanical resonator that is detuned by the delta-E effect upon application of a magnetic field. Typical frequencies of operation are from several kHz to the upper MHz regime. Different models have been used to describe the delta-E effect in those devices, but the frequency dependency has mainly been neglected. With this work we present a simple description of the delta-E effect as a function of the differential magnetic susceptibility χ of the magnetic material. We derive an analytical expression for χ that permits describing the frequency dependency of the delta-E effect of the Young’s modulus and the magnetic sensitivity. Calculations are compared with measurements on soft-magnetic (Fe90Co10)78Si12B10 thin films. We show that the frequency of operation can have a strong influence on the delta-E effect and the magnetic sensitivity of delta-E effect sensors. Overall, the delta-E effect reduces with increasing frequency and results in a stiffening of the Young’s modulus above the ferromagnetic resonance frequency. The details depend on the Gilbert damping. Whereas for large Gilbert damping the sensitivity continuously decreases with frequency, typical damping values result in an amplification close to the ferromagnetic resonance frequency.

Measuring True Young's Modulus of a Cantilevered Nanowire: Effect of Clamping on Resonance Frequency

Small ◽  
2012 ◽  
Vol 8 (16) ◽  
pp. 2571-2576 ◽  
Author(s):  
Qingquan Qin ◽  
Feng Xu ◽  
Yongqing Cao ◽  
Paul I. Ro ◽  
Yong Zhu
Keyword(s):  
Resonance Frequency ◽  
Young’S Modulus ◽  
Young's Modulus
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