High thermal stability of vacancy clusters formed in MeV Si-self-ion-implanted Si
Keyword(s):
2005 ◽
Vol 148
(2)
◽
pp. 161-168
◽
2010 ◽
Vol 59
(4)
◽
pp. 733-740
◽
Keyword(s):
2006 ◽
Vol 510-511
◽
pp. 434-437
◽
Keyword(s):