An integrated approach to piezoactuator positioning in high-speed atomic force microscope imaging

2008 ◽  
Vol 79 (7) ◽  
pp. 073704 ◽  
Author(s):  
Yan Yan ◽  
Ying Wu ◽  
Qingze Zou ◽  
Chanmin Su
Keyword(s):  
Atomic Force Microscope ◽  
High Speed ◽  
Integrated Approach ◽  
Atomic Force ◽  
Microscope Imaging

scholarly journals High-Resolution and High-Speed Atomic Force Microscope Imaging

2018 ◽  
pp. 181-200 ◽  
Author(s):  
Francesca Zuttion ◽  
Lorena Redondo-Morata ◽  
Arin Marchesi ◽  
Ignacio Casuso
Keyword(s):  
High Resolution ◽  
Atomic Force Microscope ◽  
High Speed ◽  
Atomic Force ◽  
Microscope Imaging

An Iterative-Based Feedforward-Feedback Control Approach to High-Speed Atomic Force Microscope Imaging

2009 ◽  
Vol 131 (6) ◽  
Author(s):  
Ying Wu ◽  
Qingze Zou
Keyword(s):  
Feedback Control ◽  
Atomic Force Microscope ◽  
High Speed ◽  
Tracking Error ◽  
Control Approach ◽  
Atomic Force ◽  
Afm Imaging ◽  
Current Cycle ◽  
Microscope Imaging ◽  
Precision Tracking

This article presents an iterative-based feedforward-feedback control approach to achieve high-speed atomic force microscope (AFM) imaging. AFM-imaging requires precision positioning of the probe relative to the sample in all x-y-z axes directions. Particularly, this article is focused on the vertical z-axis positioning. Recently, a current-cycle-feedback iterative-learning-control (CCF-ILC) approach has been developed for precision tracking of a given desired trajectory (even when the desired trajectory is unknown), which can be applied to achieve precision tracking of sample profile on one scanline. In this article, we extend this CCF-ILC approach to imaging of entire sample area. The main contribution of this article is the convergence analysis and the use of the CCF-ILC approach for output tracking in the presence of desired trajectory varation between iterations—the sample topography variations between adjacent scanlines. For general case where the desired trajectory variation occurs between any two successive iterations, the convergence (stability) of the CCF-ILC system is addressed and the allowable size of desired trajectory variation is quantified. The performance improvement achieved by using the CCF-ILC approach is discussed by comparing the tracking error of using the CCF-ILC technique to that of using feedback control alone. The efficacy of the proposed CCF-ILC control approach is illustrated by implementing it to the z-axis control during AFM-imaging. Experimental results are presented to show that the AFM-imaging speed can be substantially increased.

High-speed atomic force microscope imaging: Adaptive multiloop mode

2014 ◽  
Vol 90 (1) ◽  
Author(s):  
Juan Ren ◽  
Qingze Zou ◽  
Bo Li ◽  
Zhiqun Lin
Keyword(s):  
Atomic Force Microscope ◽  
High Speed ◽  
Atomic Force ◽  
Microscope Imaging

scholarly journals Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction

2021 ◽  
Author(s):  
Janik Schaude ◽  
Maxim Fimushkin ◽  
Tino Hausotte
Keyword(s):  
Atomic Force Microscope ◽  
Piezoelectric Actuator ◽  
High Speed ◽  
Closed Loop ◽  
Coefficient Of Thermal Expansion ◽  
Measuring System ◽  
Contact Mode ◽  
Loop Control ◽  
Atomic Force ◽  
Measuring Machine

AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.

scholarly journals Design and Fabrication of a High-Speed Atomic Force Microscope Scan-Head

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 362
Author(s):  
Luke Oduor Otieno ◽  
Bernard Ouma Alunda ◽  
Jaehyun Kim ◽  
Yong Joong Lee
Keyword(s):  
Atomic Force Microscope ◽  
Natural Frequency ◽  
High Speed ◽  
Contact Mode ◽  
Ongoing Process ◽  
Atomic Force ◽  
Constant Height ◽  
Mode Tracking

A high-speed atomic force microscope (HS-AFM) requires a specialized set of hardware and software and therefore improving video-rate HS-AFMs for general applications is an ongoing process. To improve the imaging rate of an AFM, all components have to be carefully redesigned since the slowest component determines the overall bandwidth of the instrument. In this work, we present a design of a compact HS-AFM scan-head featuring minimal loading on the Z-scanner. Using a custom-programmed controller and a high-speed lateral scanner, we demonstrate its working by obtaining topographic images of Blu-ray disk data tracks in contact- and tapping-modes. Images acquired using a contact-mode cantilever with a natural frequency of 60 kHz in constant deflection mode show good tracking of topography at 400 Hz. In constant height mode, tracking of topography is demonstrated at rates up to 1.9 kHz for the scan size of 1μm×1μm with 100×100 pixels.

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