Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse

2008 ◽  
Vol 92 (25) ◽  
pp. 251501 ◽  
Author(s):  
Y. Tao ◽  
M. S. Tillack ◽  
K. L. Sequoia ◽  
R. A. Burdt ◽  
S. Yuspeh ◽  
...  
2007 ◽  
Vol 91 (23) ◽  
pp. 231501 ◽  
Author(s):  
Yoshifumi Ueno ◽  
Georg Soumagne ◽  
Akira Sumitani ◽  
Akira Endo ◽  
Takeshi Higashiguchi

Vacuum ◽  
2017 ◽  
Vol 135 ◽  
pp. 86-92 ◽  
Author(s):  
Hui Lan ◽  
Haidong Lei ◽  
Duluo Zuo ◽  
Xinbing Wang ◽  
Guang Zheng

2017 ◽  
Vol 35 (4) ◽  
pp. 574-578 ◽  
Author(s):  
E. F. Barte ◽  
R. Lokasani ◽  
J. Proska ◽  
L. Maresova ◽  
D. Kos ◽  
...  

AbstractThe effects of shape and thickness of a tin surface layer and of the energy of a 170 ps neodymium:yttrium-aluminum-garnet laser pulse on the conversion efficiency (CE) into extreme ultraviolet emission in the 13.5 nm region is investigated. Whereas a CE of up to 1.16% into the 2% reflection band of multilayer Mo/Si optics was measured for a bulk Sn target at a laser energy of 25 mJ, significant CE enhancement up to 1.49% is demonstrated for a 200-nm-thick Sn layer on a microstructured porous alumina substrate.


2007 ◽  
Vol 90 (19) ◽  
pp. 191503 ◽  
Author(s):  
Yoshifumi Ueno ◽  
Tatsuya Ariga ◽  
George Soumagne ◽  
Takeshi Higashiguchi ◽  
Shoichi Kubodera ◽  
...  

Science ◽  
1996 ◽  
Vol 274 (5291) ◽  
pp. 1335-1338 ◽  
Author(s):  
R. Lieu ◽  
J. P. D. Mittaz ◽  
S. Bowyer ◽  
J. O. Breen ◽  
F. J. Lockman ◽  
...  

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