Self-sputtering runaway in high power impulse magnetron sputtering: The role of secondary electrons and multiply charged metal ions

2008 ◽  
Vol 92 (20) ◽  
pp. 201501 ◽  
Author(s):  
André Anders
Keyword(s):  
Magnetron Sputtering ◽  
Metal Ions ◽  
High Power ◽  
Secondary Electrons ◽  
Multiply Charged ◽  
Charged Metal Ions

Superimposed high power impulse and middle frequency magnetron sputtering: Role of pulse duration and average power of middle frequency

2018 ◽  
Vol 352 ◽  
pp. 680-689 ◽  
Author(s):  
Wahyu Diyatmika ◽  
Fei-Ke Liang ◽  
Bih-Show Lou ◽  
Jong-Hong Lu ◽  
De-En Sun ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Pulse Duration ◽  
High Power ◽  
Average Power

Multiply charged metal ions in high current pulsed vacuum arcs

2017 ◽  
Vol 24 (12) ◽  
pp. 123501 ◽  
Author(s):  
G. Yu. Yushkov ◽  
A. G. Nikolaev ◽  
V. P. Frolova ◽  
E. M. Oks ◽  
A. G. Rousskikh ◽  
...  
Keyword(s):  
Metal Ions ◽  
High Current ◽  
Multiply Charged ◽  
Charged Metal Ions

Carbon films deposited by mixed-mode high power impulse magnetron sputtering for high wear resistance: The role of argon incorporation

2019 ◽  
Vol 688 ◽  
pp. 137353 ◽  
Author(s):  
Behnam Akhavan ◽  
Rajesh Ganesan ◽  
Michael Stueber ◽  
Sven Ulrich ◽  
David R. McKenzie ◽  
...  
Keyword(s):  
Wear Resistance ◽  
Magnetron Sputtering ◽  
High Power ◽  
Mixed Mode ◽  
Carbon Films ◽  
High Wear Resistance

scholarly journals An efficient way to evidence and to measure the metal ion fraction in high power impulse magnetron sputtering (HiPIMS) post-discharge with Pt, Au, Pd and mixed targets

2016 ◽  
Vol 82 (6) ◽  
Author(s):  
S. Cuynet ◽  
T. Lecas ◽  
A. Caillard ◽  
P. Brault
Keyword(s):  
Magnetron Sputtering ◽  
Metal Ions ◽  
Quartz Crystal Microbalance ◽  
High Power ◽  
Metal Ion ◽  
Quartz Crystal ◽  
New Materials ◽  
Post Discharge ◽  
Potential Development ◽  
Ar Gas

The proportion of metal ions in a high power impulse magnetron sputtering discharge is key information for the potential development of new materials and new layer architectures deposited by this technique. This paper aims to measure this proportion by using a homemade system consisting of a quartz crystal microbalance and a grid energy analyser assembly. Such a system yields relevant results on the composition of the post-discharge depending on the nature of the gas (Ar, Kr, Xe) and the target materials (Pt, Pd, Au, $\text{Pt}_{50}\text{Au}_{50}$ and $\text{Pt}_{5}\text{Pd}_{95}$). In our conditions, the highest proportion of metal ions in the post-discharge are obtained by using Ar gas and reaches 10 %, 12 %, 50 %, 19 % and 88 % for Pt, Au, Pd, $\text{Pt}_{50}\text{Au}_{50}$ and $\text{Pt}_{5}\text{Pd}_{95}$ targets, respectively.

Adaptive Role of Lipids in Algae under Metal Ions Impact (a Review)

2018 ◽  
Vol 54 (6) ◽  
pp. 78-93
Author(s):  
V. V. Grubinko ◽  
O. I. Bodnar ◽  
A. I. Lutsiv ◽  
G. B. Viniarska
Keyword(s):  
Metal Ions ◽  
Adaptive Role
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