Structural and optical properties of ZnO thin films by rf magnetron sputtering with rapid thermal annealing

N. A. Suvorova; I. O. Usov; L. Stan; R. F. DePaula; A. M. Dattelbaum; Q. X. Jia; A. A. Suvorova

doi:10.1063/1.2896642

Structural and optical properties of ZnO thin films by rf magnetron sputtering with rapid thermal annealing

Applied Physics Letters ◽

10.1063/1.2896642 ◽

2008 ◽

Vol 92 (14) ◽

pp. 141911 ◽

Cited By ~ 35

Author(s):

N. A. Suvorova ◽

I. O. Usov ◽

L. Stan ◽

R. F. DePaula ◽

A. M. Dattelbaum ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Effect of substrate temperature on structural and optical properties of nanostructured ZnO thin films grown by RF magnetron sputtering

International Conference on Nanoscience, Engineering and Technology (ICONSET 2011) ◽

10.1109/iconset.2011.6167911 ◽

2011 ◽

Cited By ~ 3

Author(s):

G. Anil Kumar ◽

M. V. Ramana Reddy ◽

Katta Narasimha Reddy

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Structural and Optical properties of ZnO thin films grown on various substrates by RF magnetron sputtering

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/73/1/012133 ◽

2015 ◽

Vol 73 ◽

pp. 012133 ◽

Cited By ~ 17

Author(s):

G Anil Kumar ◽

M V Ramana Reddy ◽

Katta Narasimha Reddy

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Oxygen Effect on Structural and Optical Properties of ZnO Thin Films Deposited by RF Magnetron Sputtering

Materials Research ◽

10.1590/1980-5373-mr-2016-0478 ◽

2017 ◽

Vol 20 (3) ◽

pp. 607-612 ◽

Cited By ~ 35

Author(s):

Bassam Abdallah ◽

Abdul Kader Jazmati ◽

Raeda Refaai

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Oxygen Effect ◽

Structural And Optical Properties

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Structural and Optical Properties of ZnO Thin Films Grown on SiO2/Si(100) Substrates by RF Magnetron Sputtering

Korean Journal of Materials Research ◽

10.3740/mrsk.2006.16.6.360 ◽

2006 ◽

Vol 16 (6) ◽

pp. 360-366 ◽

Cited By ~ 1

Author(s):

Seok Kyu Han ◽

Soon-Ku Hong ◽

Hyo-Jin Kim ◽

Jae-Wook Lee ◽

Jeong-Yong Lee

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Influence of N 2 introduction on structural and optical properties of V-doped ZnO thin films grown by low-temperature reactive RF magnetron sputtering

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.12.013 ◽

2017 ◽

Vol 70 ◽

pp. 223-228 ◽

Cited By ~ 1

Author(s):

Tomoya Suzuki ◽

Hiroshi Chiba ◽

Akihiro Watanabe ◽

Tomoyuki Kawashima ◽

Katsuyoshi Washio

Keyword(s):

Thin Films ◽

Optical Properties ◽

Low Temperature ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties ◽

Doped Zno ◽

Reactive Rf Magnetron Sputtering

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Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature

Rare Metals ◽

10.1007/s12598-011-0219-3 ◽

2011 ◽

Vol 30 (2) ◽

pp. 170-174 ◽

Cited By ~ 8

Author(s):

Baoting Liu ◽

Yang Zhou ◽

Hongfang Zheng ◽

Man Li ◽

Zhe Guo ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Room Temperature ◽

Rf Magnetron Sputtering ◽

Gas Content ◽

Zno Thin Films ◽

Structural And Optical Properties ◽

Oxygen Gas

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Structural and optical properties of heat-treated Ga doped ZnO thin films grown on glass substrate by RF magnetron sputtering

Applied Science and Convergence Technology ◽

10.5757/jkvs.2008.17.1.023 ◽

2008 ◽

Vol 17 (1) ◽

pp. 23-27 ◽

Cited By ~ 1

Author(s):

J.S. Lee ◽

G.C. Kim ◽

H.H. Jeon ◽

S.J. HwangBoe ◽

D.H. Kim ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Glass Substrate ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties ◽

Heat Treated ◽

Doped Zno

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Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by RF magnetron sputtering

Physica B Condensed Matter ◽

10.1016/j.physb.2010.01.039 ◽

2010 ◽

Vol 405 (7) ◽

pp. 1782-1786 ◽

Cited By ~ 46

Author(s):

Georgi P. Daniel ◽

V.B. Justinvictor ◽

Prabitha B. Nair ◽

K. Joy ◽

Peter Koshy ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Annealing Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering

Optics Communications ◽

10.1016/j.optcom.2008.10.003 ◽

2009 ◽

Vol 282 (2) ◽

pp. 247-252 ◽

Cited By ~ 152

Author(s):

Xue-Yong Li ◽

Hong-Jian Li ◽

Zhi-Jun Wang ◽

Hui Xia ◽

Zhi-Yong Xiong ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Structural And Optical Properties ◽

Doped Zno

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Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method

Journal of Electroceramics ◽

10.1007/s10832-011-9632-0 ◽

2011 ◽

Vol 26 (1-4) ◽

pp. 84-89 ◽

Cited By ~ 14

Author(s):

Jia Li ◽

Jin-Hua Huang ◽

Yu-Long Zhang ◽

Ye Yang ◽

Wei-Jie Song ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Sol Gel ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Gel Method ◽

Sol Gel Method

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