In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasma-enhanced metalorganic chemical vapor deposition

2008 ◽  
Vol 103 (3) ◽  
pp. 033704 ◽  
Author(s):  
I. Volintiru ◽  
M. Creatore ◽  
M. C. M. van de Sanden
Keyword(s):  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Films ◽  
Remote Plasma ◽  
Doped Zno ◽  
Metalorganic Chemical

scholarly journals Properties of In-Doped ZnO Films Grown by Metalorganic Chemical Vapor Deposition on GaN(0001) Templates

2009 ◽  
Vol 39 (5) ◽  
pp. 608-611 ◽  
Author(s):  
Tammy Ben-Yaacov ◽  
Tommy Ive ◽  
Chris G. Van de Walle ◽  
Umesh K. Mishra ◽  
James S. Speck ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Films ◽  
Doped Zno ◽  
Metalorganic Chemical

In Situ Growth Monitoring During Metalorganic Chemical Vapor Deposition of YBa 2Cu 3Ox Thin Films by Spectroscopic Ellipsometry

1999 ◽  
Vol 38 (Part 2, No. 6A/B) ◽  
pp. L632-L635 ◽  
Author(s):  
Shuu'ichirou Yamamoto ◽  
Satoshi Sugai ◽  
Yasunari Matsukawa ◽  
Akio Sengoku ◽  
Hiroshi Tobisaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Monitoring ◽  
In Situ Growth ◽  
Metalorganic Chemical

Growth of In-doped ZnO films by metalorganic chemical vapor deposition on GaN(0001) templates

2009 ◽  
Vol 6 (6) ◽  
pp. 1464-1467 ◽  
Author(s):  
Tammy Ben-Yaacov ◽  
Tommy Ive ◽  
Chris G. Van de Walle ◽  
Umesh K. Mishra ◽  
James S. Speck ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Films ◽  
Doped Zno ◽  
Metalorganic Chemical
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