The importance of an external circuit in a particle-in-cell/Monte Carlo collisions model for a direct current planar magnetron
2001 ◽
Vol 19
(3)
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pp. 830-837
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Keyword(s):
2001 ◽
Vol 19
(3)
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pp. 838-847
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Keyword(s):
2016 ◽
Vol 25
(5)
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pp. 05LT01
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2017 ◽
Vol 50
(16)
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pp. 165203
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2018 ◽
Vol 59
(3)
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pp. 314-325
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2019 ◽
Vol 52
(45)
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pp. 455203
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Keyword(s):