An electron cyclotron resonance ion source based low energy ion beam platform
2008 ◽
Vol 79
(2)
◽
pp. 02B711
◽
Keyword(s):
Ion Beam
◽
1982 ◽
Vol 20
(4)
◽
pp. 986-988
◽
2012 ◽
Vol 83
(2)
◽
pp. 02A329
◽
Keyword(s):