Nanometer-Scale Stress Field Evaluation of Cu∕ILD Structure by Cathodoluminescence Spectroscopy

2007 ◽  
Author(s):  
Masako Kodera ◽  
Sachiyo Ito ◽  
Masahiko Hasunuma ◽  
Shigeru Kakinuma ◽  
Shinichi Ogawa ◽  
...  
Keyword(s):  
Stress Field ◽  
Field Evaluation ◽  
Nanometer Scale ◽  
Cathodoluminescence Spectroscopy

Fracture toughness of silicon in nanometer-scale singular stress field

2015 ◽  
Vol 150 ◽  
pp. 161-167 ◽  
Author(s):  
Takashi Sumigawa ◽  
Shinsaku Ashida ◽  
Shuhei Tanaka ◽  
Kazunori Sanada ◽  
Takayuki Kitamura
Keyword(s):  
Fracture Toughness ◽  
Stress Field ◽  
Nanometer Scale ◽  
Singular Stress ◽  
Singular Stress Field

scholarly journals Stress Field Evaluation for a Propagating Crack in a Thin Glass Plate

2007 ◽  
Vol 73 (730) ◽  
pp. 716-723
Author(s):  
Satoru YONEYAMA ◽  
Kenichi SAKAUE ◽  
Hisao KIKUTA ◽  
Masahisa TAKASHI
Keyword(s):  
Stress Field ◽  
Glass Plate ◽  
Field Evaluation ◽  
Thin Glass ◽  
Propagating Crack ◽  
Thin Glass Plate
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