Study on the noise of silicon capacitive resonant mass sensors in ambient atmosphere

2007 ◽  
Vol 102 (10) ◽  
pp. 104304 ◽  
Author(s):  
Sang-Jin Kim ◽  
Takahito Ono ◽  
Masayoshi Esashi
Keyword(s):  
Ambient Atmosphere ◽  
Mass Sensors ◽  
Resonant Mass Sensors

Ultra-High Frequency (UHF) Nanomechanical Resonator Integrated With Phase Locked Loop

2004 ◽  
Author(s):  
X. L. Feng ◽  
Y. T. Tang ◽  
C. Callegari ◽  
M. L. Roukes
Keyword(s):  
Phase Locked Loop ◽  
Small Mass ◽  
Low Noise ◽  
Nanoelectromechanical Systems ◽  
Nanomechanical Resonator ◽  
Practical Applications ◽  
Mass Sensors ◽  
Resonant Mass Sensors ◽  
And Control ◽  
Quality Factor Q

Nanoelectromechanical systems (NEMS) are interesting for both probing nanoscale physical fundamentals and exploring new technological applications [1]. In particular, nanomechanical resonators possess superb attributes including surprisingly-high operating frequency, ultra-small mass, high quality factor (Q), and thus are promising candidates for components in novel signal processing systems and ultra-sensitive sensors [1,2]. NEMS resonators with fundamental resonant frequencies exceeding 1GHz have been realized [3] and unprecedented mass sensitivity has also been demonstrated with VHF high-Q NEMS resonant mass sensors [2,4]. Among many engineering challenges to boost NEMS to more practical applications, it is of great importance to develop the generic protocol of integrating NEMS resonators with feedback and control systems. This work presents the first implementation of the integration of a UHF NEMS resonator with a low-noise phase locked loop (PLL).

Dynamics of Globally and Dissipatively Coupled Resonators

2015 ◽  
Vol 137 (2) ◽  
Author(s):  
Andrew B. Sabater ◽  
Jeffrey F. Rhoads
Keyword(s):  
Coupling Coefficient ◽  
Natural Frequencies ◽  
Coupled System ◽  
Coupled Resonators ◽  
Single Input Single Output ◽  
Collective Behaviors ◽  
Mass Sensors ◽  
Single Output ◽  
Global Coupling ◽  
Resonant Mass Sensors

This work explores the dynamics of arrays of globally and dissipatively coupled resonators. These resonator arrays are shown to be capable of exhibiting seemingly new collective behaviors which are highly sensitive to the dispersion of the natural frequencies of the constituent resonators in the array, the intrinsic damping of the resonators in the array, and the magnitude of the global coupling coefficient that captures the strength of the dissipative coupling. These behaviors have been identified within the work as group attenuation, confined attenuation, and group resonance. Group and confined attenuation are associated with an absence of energy and are strongly dependent on the dispersion of the natural frequencies. In cases of moderate dissipative coupling, the effects of group and confined attenuation could be interpreted as frequency-dependent damping. In cases where the global coupling coefficient is large, group resonance is significant. This effect is synonymous with the resonances of the constituent resonators being shared and occurring at frequencies in between the isolated resonators' natural frequencies. Accordingly, one could view group resonance as the antithesis of localization, in that the localization of the modes of a conservatively coupled system with a finite dispersion of the constituent resonators' natural frequencies is most significant when the coupling is weak. The authors believe that collective behaviors, such as those described herein, have direct applicability in new single-input, single-output resonant mass sensors, and, with extension, a variety of other sensing and signal processing systems.

NEMS Resonant Mass Sensors

2012 ◽  
pp. 1895-1895
Author(s):  
Minami Yoda ◽  
Jean-Luc Garden ◽  
Olivier Bourgeois ◽  
Aeraj Haque ◽  
Aloke Kumar ◽  
...  
Keyword(s):  
Mass Sensors ◽  
Resonant Mass Sensors

Characterization of Resonant Mass Sensors Using Inkjet Deposition

2016 ◽  
Author(s):  
Nikhil Bajaj ◽  
Jeffrey F. Rhoads ◽  
George T.-C. Chiu
Keyword(s):  
Research Attention ◽  
Spatial Sensitivity ◽  
Force Microscopy ◽  
Mass Sensors ◽  
Atomic Force ◽  
Performance Metric ◽  
Highly Sensitive ◽  
Wide Range ◽  
Specialized Equipment ◽  
Resonant Mass Sensors

Micro- and millimeter-scale resonant mass sensors have received widespread research attention due to their robust and highly-sensitive performance in a wide range of detection applications. A key performance metric associated with such systems is the sensitivity of the resonant frequency of a given device to changes in mass, which needs to be calibrated for different sensor designs. This calibration is complicated by the fact that the position of any added mass on a sensor can have an effect on the measured sensitivity, and thus a spatial sensitivity mapping is needed. To date, most approaches for experimental sensitivity characterization are based upon the controlled addition of small masses. These approaches include the direct attachment of microbeads via atomic force microscopy or the selective microelectrodeposition of material, both of which are time consuming and require specialized equipment. This work proposes a method of experimental spatial sensitivity measurement that uses an inkjet system and standard sensor readout methodology to map the spatially-dependent sensitivity of a resonant mass sensor — a significantly easier experimental approach. The methodology is described and demonstrated on a quartz resonator and used to inform practical sensor development.

scholarly journals Characterizing the Spatially Dependent Sensitivity of Resonant Mass Sensors Using Inkjet Deposition

2017 ◽  
Vol 139 (11) ◽  
Author(s):  
Nikhil Bajaj ◽  
Jeffrey F. Rhoads ◽  
George T.-C. Chiu
Keyword(s):  
Shear Mode ◽  
Spatial Sensitivity ◽  
Force Microscopy ◽  
Mass Sensors ◽  
Atomic Force ◽  
Performance Metric ◽  
Wide Range ◽  
Specialized Equipment ◽  
Resonant Mass Sensors ◽  
Thickness Shear

Micro- and millimeter-scale resonant mass sensors have received widespread attention due to their robust and sensitive performance in a wide range of detection applications. A key performance metric for such systems is the sensitivity of the resonant frequency of a device to changes in mass, which needs to be calibrated. This calibration is complicated by the fact that the position of the added mass on a sensor can have an effect on the measured sensitivity—therefore, a spatial sensitivity mapping is needed. To date, most approaches for experimental sensitivity characterization are based upon the controlled addition of small masses, e.g., the direct attachment of microbeads via atomic force microscopy or the selective microelectrodeposition of material, both of which are time consuming and require specialized equipment. This work proposes a method of experimental spatial sensitivity measurement that uses an inkjet system and standard sensor readout methodology to map the spatially dependent sensitivity of a resonant mass sensor—a significantly easier experimental approach. The methodology is described and demonstrated on a quartz resonator. In the specific case of a Kyocera CX3225 thickness-shear mode resonator, the location of the region of maximum mass sensitivity is experimentally identified.

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