Bulk acoustic wave analysis of crystalline plane oriented ZnO films

2007 ◽  
Vol 102 (8) ◽  
pp. 084908 ◽  
Author(s):  
Sean Wu ◽  
Zhi-Xun Lin ◽  
Maw-Shung Lee ◽  
Ruyen Ro
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Zno Films ◽  
Wave Analysis ◽  
Crystalline Plane

Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films

2007 ◽  
Vol 46 (10A) ◽  
pp. 6719-6726 ◽  
Author(s):  
Maw-Shung Lee ◽  
Sean Wu ◽  
Zhi-Xun Lin ◽  
Ruyen Ro
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Bulk Acoustic Wave ◽  
Wave Analysis ◽  
Crystalline Plane

Film Bulk Acoustic-Wave Resonator Based Relative Humidity Sensor Using ZnO Films

2010 ◽  
Vol 13 (5) ◽  
pp. J65 ◽  
Author(s):  
Xiaotun Qiu ◽  
Jon Oiler ◽  
Jie Zhu ◽  
Ziyu Wang ◽  
Rui Tang ◽  
...  
Keyword(s):  
Relative Humidity ◽  
Acoustic Wave ◽  
Humidity Sensor ◽  
Bulk Acoustic Wave ◽  
Zno Films ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk ◽  
Relative Humidity Sensor
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